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Squeezing Bulk Plasmon Polaritons through Hyperbolic Metamaterials for Large Area Deep Subwavelength Interference Lithography
Liang, Gaofeng1,2; Wang, Changtao1; Zhao, Zeyu1; Wang, Yanqin1; Yao, Na1; Gao, Ping1; Luo, Yunfei1; Gao, Guohan1; Zhao, Qing2; Luo, Xiangang1
Source PublicationADVANCED OPTICAL MATERIALS
Volume3Issue:9Pages:1248-1256
2015-09-01
Language英语
ISSN2195-1071
DOI10.1002/adom.201400596
Indexed BySCI
WOS IDWOS:000362524300014
SubtypeArticle
AbstractHyperbolic metamaterial composed of SiO2/Al films are explored to squeeze out bulk plasmon polaritons (BPPs) to produce large area and uniform deep subwavelength interference patterns. As examples, two and four BPPs interference lithography with half pitch 45 nm (approximate to lambda/8) are demonstrated in experiments. Much deeper resolution up to 22.5 nm (approximate to lambda/16) and variety of BPPs interference patterns are feasible. The period of grating structures for transferring photons to BPPs is much larger than that of BPPs interference patterns, facilitating the structures fabrication by simple and low cost methods like large area laser interference lithography. It is believed that the method provides a cost-effective, parallel, and large area nanofabrication way.
WOS KeywordHOLOGRAPHIC LITHOGRAPHY ; PHOTONIC CRYSTALS ; SURFACE-PLASMONS ; NANOLITHOGRAPHY ; PHOTOLITHOGRAPHY ; TRANSMISSION ; DIFFRACTION ; FABRICATION ; ULTRAVIOLET ; REFLECTION
WOS Research AreaMaterials Science ; Optics
WOS SubjectMaterials Science, Multidisciplinary ; Optics
Citation statistics
Cited Times:45[WOS]   [WOS Record]     [Related Records in WOS]
Document Type期刊论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/3717
Collection光电技术研究所被WoS收录文章
Affiliation1.Chinese Acad Sci, State Key Lab Opt Technol Nanofabricat & Microeng, Inst Opt & Elect, Chengdu 610209, Peoples R China
2.Univ Elect Sci & Technol China, Sch Phys Elect, Chengdu 610054, Peoples R China
Recommended Citation
GB/T 7714
Liang, Gaofeng,Wang, Changtao,Zhao, Zeyu,et al. Squeezing Bulk Plasmon Polaritons through Hyperbolic Metamaterials for Large Area Deep Subwavelength Interference Lithography[J]. ADVANCED OPTICAL MATERIALS,2015,3(9):1248-1256.
APA Liang, Gaofeng.,Wang, Changtao.,Zhao, Zeyu.,Wang, Yanqin.,Yao, Na.,...&Luo, Xiangang.(2015).Squeezing Bulk Plasmon Polaritons through Hyperbolic Metamaterials for Large Area Deep Subwavelength Interference Lithography.ADVANCED OPTICAL MATERIALS,3(9),1248-1256.
MLA Liang, Gaofeng,et al."Squeezing Bulk Plasmon Polaritons through Hyperbolic Metamaterials for Large Area Deep Subwavelength Interference Lithography".ADVANCED OPTICAL MATERIALS 3.9(2015):1248-1256.
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