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Scalar-Based Analysis of Phase Gratings Etched in the Micro/nanofabrication Process
Zhou, Shaolin1; Yang, Yong2; Hu, Song2; Xu, Xiangmin1
Source PublicationIEEE PHOTONICS JOURNAL
Volume7Issue:4
2015-08-01
Language英语
ISSN1943-0655
DOI10.1109/JPHOT.2015.2447938
Indexed BySCI
WOS IDWOS:000361069900025
SubtypeArticle
AbstractThe diffraction characteristics of several types of phase gratings often etched on the substrate by the micro/nanofabrication techniques are analytically explored using scalar-based analysis in this paper. The process of an incident wave being reflected or transmitted by the diffraction grating is regarded as a process of modulation, and the reflectance or transmittance can be unified as the modulation index. The mechanisms of phase modulation, amplitude modulation, and the amplitude-phase hybrid modulation in different situations are discussed. Analytical results indicate that the diffraction efficiency is directly determined by the phase difference of adjacent features, i. e., the cyclically distributed ridges and grooves that induce different phase and amplitude variations. The absolute phase grating with phase difference equivalent to pi has the maximum diffraction efficiency among all types of gratings. The conclusions could, in general, provide guidance for the design and micro/nanofabrication of phase gratings for many diffractionbased applications of optical metrology or imaging.
KeywordDiffraction And Gratings Micro/nanofabrication Phase Modulation
WOS KeywordCOUPLED-WAVE ANALYSIS ; TALBOT LITHOGRAPHY ; DIFFRACTION THEORY ; MOIRE FRINGE ; ALIGNMENT ; RESOLUTION ; LIMITS
WOS Research AreaEngineering ; Optics ; Physics
WOS SubjectEngineering, Electrical & Electronic ; Optics ; Physics, Applied
Citation statistics
Cited Times:2[WOS]   [WOS Record]     [Related Records in WOS]
Document Type期刊论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/3706
Collection光电技术研究所被WoS收录文章
Affiliation1.S China Univ Technol, Sch Elect & Informat Engn, Guangzhou 510640, Guangdong, Peoples R China
2.Chinese Acad Sci, Inst Opt & Elect, State Key Lab Opt Technol Microfabricat, Chengdu 610209, Peoples R China
Recommended Citation
GB/T 7714
Zhou, Shaolin,Yang, Yong,Hu, Song,et al. Scalar-Based Analysis of Phase Gratings Etched in the Micro/nanofabrication Process[J]. IEEE PHOTONICS JOURNAL,2015,7(4).
APA Zhou, Shaolin,Yang, Yong,Hu, Song,&Xu, Xiangmin.(2015).Scalar-Based Analysis of Phase Gratings Etched in the Micro/nanofabrication Process.IEEE PHOTONICS JOURNAL,7(4).
MLA Zhou, Shaolin,et al."Scalar-Based Analysis of Phase Gratings Etched in the Micro/nanofabrication Process".IEEE PHOTONICS JOURNAL 7.4(2015).
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