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IOE OpenIR  > 光电技术研究所被WoS收录文章  > 期刊论文
题名:
Combined Frequency- and Time-Domain Photocarrier Radiometry Characterization for Annealing Temperature Dependence of Arsenic Ion-Implanted Silicon Wafers
作者: Ren, Shengdong1,2,3; Li, Bincheng1,2; Wang, Qian1,2,3
刊名: INTERNATIONAL JOURNAL OF THERMOPHYSICS
出版日期: 2015-06-01
卷号: 36, 期号:5-6, 页码:1045-1050
关键词: Carrier effective lifetime ; Photocarrier radiometry ; Silicon ; Thermal annealing
文章类型: Article
英文摘要: The annealing temperature dependences of the photocarrier radiometry (PCR) amplitude, the frequency dependences of the PCR amplitude and phase, as well as the quasi-time-domain PCR waveforms were simultaneously employed to analyze the thermally annealed (C to C) silicon samples with arsenic ion (As implantation of cm dose. The dependence of the carrier effective lifetime on the annealing temperature has been extracted from the normalized quasi-time-domain PCR waveform profiles, and showed to be related to the transient PCR signals. Furthermore, the phenomenon of the reduction of the carrier effective lifetime caused by incomplete annealing (above C and 30 s) of As implanted silicon samples were observed and analyzed.
WOS标题词: Science & Technology ; Physical Sciences ; Technology
类目[WOS]: Thermodynamics ; Chemistry, Physical ; Mechanics ; Physics, Applied
研究领域[WOS]: Thermodynamics ; Chemistry ; Mechanics ; Physics
关键词[WOS]: SI
收录类别: SCI
语种: 英语
WOS记录号: WOS:000356611100032
Citation statistics:
内容类型: 期刊论文
URI标识: http://ir.ioe.ac.cn/handle/181551/3665
Appears in Collections:光电技术研究所被WoS收录文章_期刊论文

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作者单位: 1.Chinese Acad Sci, Inst Optic & Elect, Chengdu 610209, Sichuan, Peoples R China
2.Chinese Acad Sci, Key Lab Opt Engn, Chengdu 610209, Sichuan, Peoples R China
3.Univ Chinese Acad Sci, Beijing 100039, Peoples R China

Recommended Citation:
Ren, Shengdong,Li, Bincheng,Wang, Qian. Combined Frequency- and Time-Domain Photocarrier Radiometry Characterization for Annealing Temperature Dependence of Arsenic Ion-Implanted Silicon Wafers[J]. INTERNATIONAL JOURNAL OF THERMOPHYSICS,2015,36(5-6):1045-1050.
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