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题名:
Concept and modeling analysis of a high fidelity multimode deformable mirror
作者: Zhou, Chao1; Li, Yun2; Wang, Anding2; Xing, Tingwen2
刊名: APPLIED OPTICS
出版日期: 2015-06-10
卷号: 54, 期号:17, 页码:5436-5443
文章类型: Article
英文摘要: Conventional deformable mirrors (DM) cannot meet the requirement of aberration controlling for advanced lithography tools. This paper illustrates an approach using the property that deformation of a thin plate is similar to optical modes to realize a high fidelity multimode deformable mirror whose deformation has characteristics of optical aberration modes. The way to arrange actuators is also examined. In this paper, a 36-actuator deformable mirror is taken as an example to generate low-order Zernike modes. The result shows that this DM generates the fourth fringe Zernike mode (Z4) defocus, and primary aberration Z5-Z8 with an error less than 0.5%, generates the fifth-order aberration Z10-Z14, and generates the seventh-order aberration Z17-Z20 with an error less than 1.1%. The high fidelity replication of the Zernike mode indicates that the DM satisfies the demand of controlling aberrations corresponding to the first 20 Zernike modes in an advanced lithography tool. (C) 2015 Optical Society of America
WOS标题词: Science & Technology ; Physical Sciences
类目[WOS]: Optics
研究领域[WOS]: Optics
关键词[WOS]: ADAPTIVE OPTICS ; LOW-COST ; LITHOGRAPHY ; PERFORMANCE ; UNIMORPH ; MODES
收录类别: SCI
语种: 英语
WOS记录号: WOS:000356101200023
Citation statistics:
内容类型: 期刊论文
URI标识: http://ir.ioe.ac.cn/handle/181551/3661
Appears in Collections:光电技术研究所被WoS收录文章_期刊论文

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作者单位: 1.Univ Chinese Acad Sci, Beijing 100049, Peoples R China
2.Chinese Acad Sci, Inst Opt & Elect, Chengdu 610209, Sichuan, Peoples R China

Recommended Citation:
Zhou, Chao,Li, Yun,Wang, Anding,et al. Concept and modeling analysis of a high fidelity multimode deformable mirror[J]. APPLIED OPTICS,2015,54(17):5436-5443.
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