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题名:
FEM/SPH simulation research and experiment of surface roughness based on traditional polishing process
作者: Shen Li-Jun1,2; Wan Yong-Jian1; Meng Kai1,2; Huang Chuan-Ke1,2
刊名: OPTICAL REVIEW
出版日期: 2015-06-01
卷号: 22, 期号:3, 页码:393-401
关键词: FEM/SPH simulation ; Traditional polishing ; K9 glass ; Ceria particle ; Surface roughness
文章类型: Article
英文摘要: Surface roughness is one of the most important parameters of surface quality and a difficult technical issue in glass polishing, especially for traditional polishing. In this paper, the coupled algorithm of FEM/SPH has been used to simulate the deformation of brittle K9 glass in traditional polishing. The influences of polishing particle size and insert depth on surface roughness are analyzed in detail. Then, experiment is carried out on a empty set 100 mm flat K9 mirror with three sorts of particle, ceria abrasive particle with 1.2, 1.6 and 2 mu m. Simulation and experiment results show that surface roughness of brittle glass has direct relationship with particle size during traditional polishing process. The surface roughness is better as the particle size is smaller.
WOS标题词: Science & Technology ; Physical Sciences
类目[WOS]: Optics
研究领域[WOS]: Optics
关键词[WOS]: HYDRODYNAMICS
收录类别: SCI
语种: 英语
WOS记录号: WOS:000355599500002
Citation statistics:
内容类型: 期刊论文
URI标识: http://ir.ioe.ac.cn/handle/181551/3658
Appears in Collections:光电技术研究所被WoS收录文章_期刊论文

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作者单位: 1.Chinese Acad Sci, Inst Opt & Elect, Chengdu 610209, Peoples R China
2.Univ Chinese Acad Sci, Beijing 100039, Peoples R China

Recommended Citation:
Shen Li-Jun,Wan Yong-Jian,Meng Kai,et al. FEM/SPH simulation research and experiment of surface roughness based on traditional polishing process[J]. OPTICAL REVIEW,2015,22(3):393-401.
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