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题名:
Measurement of electronic transport property of semiconductors by three-dimensional modulated free carrier absorption technique
作者: Zhang Xi-Ren1,2; Li Bin-Cheng1; Liu Xian-Ming1,2
刊名: ACTA PHYSICA SINICA
出版日期: 2008-11-01
卷号: 57, 期号:11, 页码:7310-7316
关键词: modulated free carrier absorption ; electronic transport properties ; radial scan
文章类型: Article
英文摘要: A three-dimensional model for the modulated free carrier absorption (MFCA) is developed to measure the electronic transport properties (the carrier lifetime, the carrier diffusivity, and the front surface recombination velocity) of semiconductor wafers. The dependence of MFCA amplitude and phase on the electronic transport properties at different pump-probe-beam separation and different modulation frequencies is investigated. It is found that the sensitivities of MFCA signal to individual transport parameters increase with increasing two-beam separation. An experiment with a silicon wafer is performed and the carrier lifetime, carrier diffusivity, and front surface recombination velocity are determined simultaneously and unambiguously by fitting the observed values of the MFCA amplitude and phase as functions of the separation between the pump and probe laser spots, measured at several modulation frequencies covering an appropriate range.
WOS标题词: Science & Technology ; Physical Sciences
类目[WOS]: Physics, Multidisciplinary
研究领域[WOS]: Physics
关键词[WOS]: SILICON-WAFERS ; RECOMBINATION PARAMETERS
收录类别: SCI
语种: 英语
WOS记录号: WOS:000260946500099
Citation statistics:
内容类型: 期刊论文
URI标识: http://ir.ioe.ac.cn/handle/181551/3653
Appears in Collections:光电技术研究所被WoS收录文章_期刊论文

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作者单位: 1.Chinese Acad Sci, Inst Opt & Elect, Chengdu 610209, Peoples R China
2.Chinese Acad Sci, Grad Sch, Beijing 100049, Peoples R China

Recommended Citation:
Zhang Xi-Ren,Li Bin-Cheng,Liu Xian-Ming. Measurement of electronic transport property of semiconductors by three-dimensional modulated free carrier absorption technique[J]. ACTA PHYSICA SINICA,2008,57(11):7310-7316.
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