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Measurement of electronic transport property of semiconductors by three-dimensional modulated free carrier absorption technique
Zhang Xi-Ren1,2; Li Bin-Cheng1; Liu Xian-Ming1,2
Source PublicationACTA PHYSICA SINICA
Volume57Issue:11Pages:7310-7316
2008-11-01
Language英语
Indexed BySCI
WOS IDWOS:000260946500099
SubtypeArticle
AbstractA three-dimensional model for the modulated free carrier absorption (MFCA) is developed to measure the electronic transport properties (the carrier lifetime, the carrier diffusivity, and the front surface recombination velocity) of semiconductor wafers. The dependence of MFCA amplitude and phase on the electronic transport properties at different pump-probe-beam separation and different modulation frequencies is investigated. It is found that the sensitivities of MFCA signal to individual transport parameters increase with increasing two-beam separation. An experiment with a silicon wafer is performed and the carrier lifetime, carrier diffusivity, and front surface recombination velocity are determined simultaneously and unambiguously by fitting the observed values of the MFCA amplitude and phase as functions of the separation between the pump and probe laser spots, measured at several modulation frequencies covering an appropriate range.
KeywordModulated Free Carrier Absorption Electronic Transport Properties Radial Scan
WOS KeywordSILICON-WAFERS ; RECOMBINATION PARAMETERS
WOS Research AreaPhysics
WOS SubjectPhysics, Multidisciplinary
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Document Type期刊论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/3653
Collection光电技术研究所被WoS收录文章
Affiliation1.Chinese Acad Sci, Inst Opt & Elect, Chengdu 610209, Peoples R China
2.Chinese Acad Sci, Grad Sch, Beijing 100049, Peoples R China
Recommended Citation
GB/T 7714
Zhang Xi-Ren,Li Bin-Cheng,Liu Xian-Ming. Measurement of electronic transport property of semiconductors by three-dimensional modulated free carrier absorption technique[J]. ACTA PHYSICA SINICA,2008,57(11):7310-7316.
APA Zhang Xi-Ren,Li Bin-Cheng,&Liu Xian-Ming.(2008).Measurement of electronic transport property of semiconductors by three-dimensional modulated free carrier absorption technique.ACTA PHYSICA SINICA,57(11),7310-7316.
MLA Zhang Xi-Ren,et al."Measurement of electronic transport property of semiconductors by three-dimensional modulated free carrier absorption technique".ACTA PHYSICA SINICA 57.11(2008):7310-7316.
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