IOE OpenIR  > 光电技术研究所被WoS收录文章
Micro-optical devices formed by a dynamic photolithographic approach
Du, Chunlei; Dong, Xiaochun; Deng, Qiling; Shi, Lifang; Luo, Xiangang; Zhang, Yudong
Source PublicationJOURNAL OF OPTICS A-PURE AND APPLIED OPTICS
Volume10Issue:6
2008-06-01
Language英语
Indexed BySCI ; ISTP
WOS IDWOS:000256619700008
SubtypeArticle
AbstractWe outline a unique photolithographic approach, by employing both periodic and aperiodic binary moving masks, that is developed for forming micro-optical structures effectively with a continuous profile. The mechanism for forming different micro-optical profiles is disclosed, and the designed approach for a binary moving mask is described. Finally, concrete micro-optical devices with continuous microprofiles, including a microlens array with different sub-apertures and an irregular distributed phase plate, are demonstrated and evaluated.
KeywordMicrooptical Structure Microlens Array Microlithography
WOS KeywordFABRICATION ; ARRAY ; MICROLENSES
WOS Research AreaOptics
WOS SubjectOptics
Citation statistics
Document Type期刊论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/3644
Collection光电技术研究所被WoS收录文章
AffiliationChinese Acad Sci, Inst Opt & Elect, State Key Lab Opt Technol Microfabricat, Chengdu 610209, Peoples R China
Recommended Citation
GB/T 7714
Du, Chunlei,Dong, Xiaochun,Deng, Qiling,et al. Micro-optical devices formed by a dynamic photolithographic approach[J]. JOURNAL OF OPTICS A-PURE AND APPLIED OPTICS,2008,10(6).
APA Du, Chunlei,Dong, Xiaochun,Deng, Qiling,Shi, Lifang,Luo, Xiangang,&Zhang, Yudong.(2008).Micro-optical devices formed by a dynamic photolithographic approach.JOURNAL OF OPTICS A-PURE AND APPLIED OPTICS,10(6).
MLA Du, Chunlei,et al."Micro-optical devices formed by a dynamic photolithographic approach".JOURNAL OF OPTICS A-PURE AND APPLIED OPTICS 10.6(2008).
Files in This Item:
There are no files associated with this item.
Related Services
Recommend this item
Bookmark
Usage statistics
Export to Endnote
Google Scholar
Similar articles in Google Scholar
[Du, Chunlei]'s Articles
[Dong, Xiaochun]'s Articles
[Deng, Qiling]'s Articles
Baidu academic
Similar articles in Baidu academic
[Du, Chunlei]'s Articles
[Dong, Xiaochun]'s Articles
[Deng, Qiling]'s Articles
Bing Scholar
Similar articles in Bing Scholar
[Du, Chunlei]'s Articles
[Dong, Xiaochun]'s Articles
[Deng, Qiling]'s Articles
Terms of Use
No data!
Social Bookmark/Share
All comments (0)
No comment.
 

Items in the repository are protected by copyright, with all rights reserved, unless otherwise indicated.