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题名:
Micro-optical devices formed by a dynamic photolithographic approach
作者: Du, Chunlei; Dong, Xiaochun; Deng, Qiling; Shi, Lifang; Luo, Xiangang; Zhang, Yudong
刊名: JOURNAL OF OPTICS A-PURE AND APPLIED OPTICS
出版日期: 2008-06-01
卷号: 10, 期号:6
关键词: microoptical structure ; microlens array ; microlithography
文章类型: Article
英文摘要: We outline a unique photolithographic approach, by employing both periodic and aperiodic binary moving masks, that is developed for forming micro-optical structures effectively with a continuous profile. The mechanism for forming different micro-optical profiles is disclosed, and the designed approach for a binary moving mask is described. Finally, concrete micro-optical devices with continuous microprofiles, including a microlens array with different sub-apertures and an irregular distributed phase plate, are demonstrated and evaluated.
WOS标题词: Science & Technology ; Physical Sciences
类目[WOS]: Optics
研究领域[WOS]: Optics
关键词[WOS]: FABRICATION ; ARRAY ; MICROLENSES
收录类别: SCI ; ISTP
语种: 英语
WOS记录号: WOS:000256619700008
Citation statistics:
内容类型: 期刊论文
URI标识: http://ir.ioe.ac.cn/handle/181551/3644
Appears in Collections:光电技术研究所被WoS收录文章_期刊论文

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作者单位: Chinese Acad Sci, Inst Opt & Elect, State Key Lab Opt Technol Microfabricat, Chengdu 610209, Peoples R China

Recommended Citation:
Du, Chunlei,Dong, Xiaochun,Deng, Qiling,et al. Micro-optical devices formed by a dynamic photolithographic approach[J]. JOURNAL OF OPTICS A-PURE AND APPLIED OPTICS,2008,10(6).
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