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题名:
Superlens nano-patterning technology based on the distributed Polystyrene spheres
作者: Li, Shuhong1,2; Du, Chunlei1; Dong, Xiaochun1; Shi, Lifang1,2; Luo, Xiangang1; Wei, Xingzhan1,2; Zhang, Yudong1
刊名: OPTICS EXPRESS
出版日期: 2008-09-15
卷号: 16, 期号:19, 页码:14397-14403
文章类型: Article
英文摘要: Based on surface plasmon resonant enhancement, a method to realize photolithography beyond diffraction limit by using polystyrene spheres (PSs) self-assembled on silver slab was proposed in this paper. The optimum parameters for PS with different diameters were presented. In order to verify this method, numerical simulation on a typical configuration with 1.5 mu m diameter of PS was carried out by using the finite-difference time-domain (FDTD) method, and the minimum feature size of 88nm beyond diffraction limit at 365nm working wavelength was obtained. (c) 2008 Optical Society of America.
WOS标题词: Science & Technology ; Physical Sciences
类目[WOS]: Optics
研究领域[WOS]: Optics
关键词[WOS]: OPTICAL LITHOGRAPHY ; DIFFRACTION LIMIT ; SILVER SUPERLENS ; ARRAYS ; FABRICATION ; PHOTOLITHOGRAPHY ; MICROLENSES ; LENSES ; BEAM
收录类别: SCI
语种: 英语
WOS记录号: WOS:000259271900010
Citation statistics:
内容类型: 期刊论文
URI标识: http://ir.ioe.ac.cn/handle/181551/3617
Appears in Collections:光电技术研究所被WoS收录文章_期刊论文

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作者单位: 1.Chinese Acad Sci, Inst Opt & Elect, State Key Lab Opt Technol Microfabricat, Chengdu 610209, Peoples R China
2.Chinese Acad Sci, Grad Sch, Beijing 100039, Peoples R China

Recommended Citation:
Li, Shuhong,Du, Chunlei,Dong, Xiaochun,et al. Superlens nano-patterning technology based on the distributed Polystyrene spheres[J]. OPTICS EXPRESS,2008,16(19):14397-14403.
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