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题名:
Ag dots array fabricated using laser interference technique for biosensing
作者: Li, Haiying; Luo, Xiangang; Du, Chunlei; Chen, Xunan; Fu, Yongqi
刊名: SENSORS AND ACTUATORS B-CHEMICAL
出版日期: 2008-09-25
卷号: 134, 期号:2, 页码:940-944
关键词: LSPR ; Laser interference lithography ; Etching ; Biosensing
文章类型: Article
英文摘要: An interference lithography technique was adopted to fabricate Ag dots array. It has advantages of mask free, cost effective, and good controllability compared to the conventional nanosphere lithography (NSL) method. One-dimensional (1D) grating structures, two-dimensional (2D) grid patterns, and 2D dots array were obtained on the photoresist film by means of direct exposing the resist using the interference patterns. Then the photoresist patterns were transferred to the quartz substrate by wet etching and reactive ion etching. Atomic force microscope (AFM) was employed for geometrical characterization of the patterns generated in the steps from pattern generation to pattern transfer, respectively. The Ag dots array was formed by depositing an Ag thin film of similar to 25 nm in thickness on the quartz. Our experimental results showed that wavelength shifts in the extinction spectra is acceptable for the applications of localized surface plasmon resonance (LSPR)-based immunoassay and binding detection. (c) 2008 Elsevier B.V. All rights reserved.
WOS标题词: Science & Technology ; Physical Sciences ; Technology
类目[WOS]: Chemistry, Analytical ; Electrochemistry ; Instruments & Instrumentation
研究领域[WOS]: Chemistry ; Electrochemistry ; Instruments & Instrumentation
关键词[WOS]: SURFACE-PLASMON RESONANCE ; NANOSPHERE LITHOGRAPHY ; SILVER NANOPARTICLES ; SPECTROSCOPY ; SENSITIVITY ; DEPENDENCE ; SENSORS
收录类别: SCI
语种: 英语
WOS记录号: WOS:000260147100091
Citation statistics:
内容类型: 期刊论文
URI标识: http://ir.ioe.ac.cn/handle/181551/3605
Appears in Collections:光电技术研究所被WoS收录文章_期刊论文

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作者单位: Chinese Acad Sci, Inst Opt & Elect, State Key Lab Opt Technol Microfabricat, Chengdu 610209, Sichuan Prov, Peoples R China

Recommended Citation:
Li, Haiying,Luo, Xiangang,Du, Chunlei,et al. Ag dots array fabricated using laser interference technique for biosensing[J]. SENSORS AND ACTUATORS B-CHEMICAL,2008,134(2):940-944.
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