中国科学院光电技术研究所机构知识库
Advanced  
IOE OpenIR  > 光电技术研究所被WoS收录文章  > 期刊论文
题名:
Localized surface plasmon nanolithography with ultrahigh resolution
作者: Wei, Xingzhan; Luo, Xiangang; Dong, Xiaochun; Du, Chunlei
刊名: OPTICS EXPRESS
出版日期: 2007-10-17
卷号: 15, 期号:21, 页码:14177-14183
文章类型: Article
英文摘要: A localized surface plasmon nanolithography (LSPN) technique is proposed and demonstrated to produce patterns with a sub-20nm line width. High transmission efficiency is realized by adjusting the period of grating. The well-regulated grating structures in metallic mask are employed to excite surface plasmon polaritons (SPPs) on the illuminated side. The SPP waves propagate toward the tip along the taper surfaces which cause most of energy accumulation at the tip and give rise to high local field enhancements in a near-field region around the tip. The amplitude of local electric field intensity is quite large and the line width can be confined within sub-20nm, at the same time, the contrast and spatial resolution are greatly enhanced, which can facilitate nanolithography efficiently with simple ultraviolet light sources. (c) 2007 Optical Society of America.
WOS标题词: Science & Technology ; Physical Sciences
类目[WOS]: Optics
研究领域[WOS]: Optics
关键词[WOS]: INTERFERENCE NANOLITHOGRAPHY ; NEAR-FIELD ; LITHOGRAPHY ; TRANSMISSION
收录类别: SCI
语种: 英语
WOS记录号: WOS:000251223100076
Citation statistics:
内容类型: 期刊论文
URI标识: http://ir.ioe.ac.cn/handle/181551/3595
Appears in Collections:光电技术研究所被WoS收录文章_期刊论文

Files in This Item:

There are no files associated with this item.


作者单位: Chinese Acad Sci, Inst Opt & Elect, State Key Lab Opt Technol Microfabricat, Chengdu 610209, Peoples R China

Recommended Citation:
Wei, Xingzhan,Luo, Xiangang,Dong, Xiaochun,et al. Localized surface plasmon nanolithography with ultrahigh resolution[J]. OPTICS EXPRESS,2007,15(21):14177-14183.
Service
Recommend this item
Sava as my favorate item
Show this item's statistics
Export Endnote File
Google Scholar
Similar articles in Google Scholar
[Wei, Xingzhan]'s Articles
[Luo, Xiangang]'s Articles
[Dong, Xiaochun]'s Articles
CSDL cross search
Similar articles in CSDL Cross Search
[Wei, Xingzhan]‘s Articles
[Luo, Xiangang]‘s Articles
[Dong, Xiaochun]‘s Articles
Related Copyright Policies
Null
Social Bookmarking
Add to CiteULike Add to Connotea Add to Del.icio.us Add to Digg Add to Reddit
所有评论 (0)
暂无评论
 
评注功能仅针对注册用户开放,请您登录
您对该条目有什么异议,请填写以下表单,管理员会尽快联系您。
内 容:
Email:  *
单位:
验证码:   刷新
您在IR的使用过程中有什么好的想法或者建议可以反馈给我们。
标 题:
 *
内 容:
Email:  *
验证码:   刷新

Items in IR are protected by copyright, with all rights reserved, unless otherwise indicated.

 

 

Valid XHTML 1.0!
Copyright © 2007-2016  中国科学院光电技术研究所 - Feedback
Powered by CSpace