IOE OpenIR  > 光电技术研究所被WoS收录文章
Formation for bass-relief microprofiles based on an analytic formulation
Shi Li-Fang; Dong Xiao-Chun; Deng Qi-Ling; Luo Xian-Gang; Du Chun-Lei
Source PublicationCHINESE PHYSICS LETTERS
Volume24Issue:10Pages:2867-2869
2007-10-01
Language英语
Indexed BySCI
WOS IDWOS:000249810900043
SubtypeArticle
AbstractA method of fast design and fabrication for bass-relief micro-profiles is developed by using an analytic formulation to determine the exposure distribution. Based on an equivalent exposure threshold model, the formulation is simplified for the case of bass-relief profile corresponding to the smaller exposure dose. The mask function for a microlens array is designed without iteration involved by the analytic formulation. The experiment is performed to validate the method, and the fabrication result is obtained with the profile error less than 30 nm (rms).
WOS Research AreaPhysics
WOS SubjectPhysics, Multidisciplinary
Citation statistics
Document Type期刊论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/3566
Collection光电技术研究所被WoS收录文章
AffiliationChinese Acad Sci, Inst Opt & Elect, State Key Lab Opt Technol Microfabricat, Chengdu 610209, Peoples R China
Recommended Citation
GB/T 7714
Shi Li-Fang,Dong Xiao-Chun,Deng Qi-Ling,et al. Formation for bass-relief microprofiles based on an analytic formulation[J]. CHINESE PHYSICS LETTERS,2007,24(10):2867-2869.
APA Shi Li-Fang,Dong Xiao-Chun,Deng Qi-Ling,Luo Xian-Gang,&Du Chun-Lei.(2007).Formation for bass-relief microprofiles based on an analytic formulation.CHINESE PHYSICS LETTERS,24(10),2867-2869.
MLA Shi Li-Fang,et al."Formation for bass-relief microprofiles based on an analytic formulation".CHINESE PHYSICS LETTERS 24.10(2007):2867-2869.
Files in This Item:
There are no files associated with this item.
Related Services
Recommend this item
Bookmark
Usage statistics
Export to Endnote
Google Scholar
Similar articles in Google Scholar
[Shi Li-Fang]'s Articles
[Dong Xiao-Chun]'s Articles
[Deng Qi-Ling]'s Articles
Baidu academic
Similar articles in Baidu academic
[Shi Li-Fang]'s Articles
[Dong Xiao-Chun]'s Articles
[Deng Qi-Ling]'s Articles
Bing Scholar
Similar articles in Bing Scholar
[Shi Li-Fang]'s Articles
[Dong Xiao-Chun]'s Articles
[Deng Qi-Ling]'s Articles
Terms of Use
No data!
Social Bookmark/Share
All comments (0)
No comment.
 

Items in the repository are protected by copyright, with all rights reserved, unless otherwise indicated.