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题名:
Microfabrication of a diffractive microlens array on n-GaAs by an efficient electrochemical method
作者: Zhang, Li; Ma, Xin Z.; Zhuang, Jin L.; Qiu, Chuan K.; Du, Chun L.; Tang, Jing; Tian, Zhao W.
刊名: ADVANCED MATERIALS
出版日期: 2007-11-19
卷号: 19, 期号:22, 页码:3912-+
文章类型: Article
英文摘要: A first example of the fabrication of large-scale diffractive microlens arrays on n-GaAs using an efficient electro-chemical technique named CELT (confined etchant layer technique) is reported. This microlens array is an eight-phase level diffractive optic device with eight concentric rings and seven steps in one lenslet. When appropriate chemical solutions and etching conditions are chosen, an approximate copy of the diffractive microlens array on the quartz is transferred onto the n-GaAs.
WOS标题词: Science & Technology ; Physical Sciences ; Technology
类目[WOS]: Chemistry, Multidisciplinary ; Chemistry, Physical ; Nanoscience & Nanotechnology ; Materials Science, Multidisciplinary ; Physics, Applied ; Physics, Condensed Matter
研究领域[WOS]: Chemistry ; Science & Technology - Other Topics ; Materials Science ; Physics
关键词[WOS]: ETCHANT LAYER TECHNIQUE ; SOFT-LITHOGRAPHY ; FEEDBACK MODE ; MICROSCOPE ; FABRICATION ; RESOLUTION ; SILICON ; PHOTOLITHOGRAPHY ; NANOFABRICATION ; DEPOSITION
收录类别: SCI
语种: 英语
WOS记录号: WOS:000251383900027
Citation statistics:
内容类型: 期刊论文
URI标识: http://ir.ioe.ac.cn/handle/181551/3563
Appears in Collections:光电技术研究所被WoS收录文章_期刊论文

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作者单位: 1.Xiamen Univ, Dept Chem, Xiamen 361005, Peoples R China
2.State Key Lab Phys Chem Solid Surfaces, Xiamen 361005, Peoples R China
3.Chinese Acad Sci, Inst Opt & Elect, State Key Lab Opt Technol Microfabricat, Chengdu 610209, Peoples R China

Recommended Citation:
Zhang, Li,Ma, Xin Z.,Zhuang, Jin L.,et al. Microfabrication of a diffractive microlens array on n-GaAs by an efficient electrochemical method[J]. ADVANCED MATERIALS,2007,19(22):3912-+.
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