Digital-multi-micromirror device (DMD)-based photolithography technique is a promising tool for the fabrication of microstructure. In this paper an imaging model was developed for describing its complicated imaging process, and then the fabrication processes of some typical diffractive optical elements (DOEs) were simulated. The simulated results demonstrate that the DMD-based lithography technique allows to realize a wide variety of microoptical elements, e.g., Dammann grating, Fresnel lens, beam shaping element or refractive micro structures. (c) 2006 Elsevier B.V. All rights reserved.
1.Sichuan Univ, Dept Phys, Chengdu 610064, Peoples R China 2.CAS, Inst Opt & Elect, Chengdu 610209, Peoples R China 3.Rutherford Appleton Lab, Didcot OX11 0QX, Oxon, England 4.Univ Durham, Dept Phys, Durham DL1 3DJ, England
Recommended Citation:
Guo, XW,Du, JL,Guo, YK,et al. Simulation of DOE fabrication using DMD-based gray-tone lithography[J]. MICROELECTRONIC ENGINEERING,2006,83(4-9):1012-1016.
