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题名:
Mask-shift filtering for forming microstructures with irregular profile
作者: Dong, Xiaochun; Du, Chunlei; Wang, Changtao; Deng, Qiling; Zhang, Yudong; Luo, Xiangang
刊名: APPLIED PHYSICS LETTERS
出版日期: 2006-12-25
卷号: 89, 期号:26
文章类型: Article
英文摘要: A method of mask-shift filtering is presented for forming microstructures with irregular profile. When a three-dimensional (3D) microstructure is quantized to a number of microslices in one direction with equal interval, their two-dimensional average projections are calculated, respectively. A shift filtering mask is constructed by arranging the submasks converted from the corresponding subprojections. Filtering is carried out during exposure by moving the mask in the quantized direction to form a 3D microprofile on resist. The experimental results for forming irregular continuous relief profile in the larger areas are demonstrated and analyzed in this letter. (c) 2006 American Institute of Physics.
WOS标题词: Science & Technology ; Physical Sciences
类目[WOS]: Physics, Applied
研究领域[WOS]: Physics
收录类别: SCI
语种: 英语
WOS记录号: WOS:000243157600005
Citation statistics:
内容类型: 期刊论文
URI标识: http://ir.ioe.ac.cn/handle/181551/3540
Appears in Collections:光电技术研究所被WoS收录文章_期刊论文

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作者单位: Chinese Acad Sci, Inst Opt & Elect, State Key Lab Opt Technol Microfabricat, Chengdu 610209, Sichuan Prov, Peoples R China

Recommended Citation:
Dong, Xiaochun,Du, Chunlei,Wang, Changtao,et al. Mask-shift filtering for forming microstructures with irregular profile[J]. APPLIED PHYSICS LETTERS,2006,89(26).
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