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Mask-shift filtering for forming microstructures with irregular profile
Dong, Xiaochun; Du, Chunlei; Wang, Changtao; Deng, Qiling; Zhang, Yudong; Luo, Xiangang
Source PublicationAPPLIED PHYSICS LETTERS
Volume89Issue:26
2006-12-25
Language英语
Indexed BySCI
WOS IDWOS:000243157600005
SubtypeArticle
AbstractA method of mask-shift filtering is presented for forming microstructures with irregular profile. When a three-dimensional (3D) microstructure is quantized to a number of microslices in one direction with equal interval, their two-dimensional average projections are calculated, respectively. A shift filtering mask is constructed by arranging the submasks converted from the corresponding subprojections. Filtering is carried out during exposure by moving the mask in the quantized direction to form a 3D microprofile on resist. The experimental results for forming irregular continuous relief profile in the larger areas are demonstrated and analyzed in this letter. (c) 2006 American Institute of Physics.
WOS Research AreaPhysics
WOS SubjectPhysics, Applied
Citation statistics
Cited Times:4[WOS]   [WOS Record]     [Related Records in WOS]
Document Type期刊论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/3540
Collection光电技术研究所被WoS收录文章
AffiliationChinese Acad Sci, Inst Opt & Elect, State Key Lab Opt Technol Microfabricat, Chengdu 610209, Sichuan Prov, Peoples R China
Recommended Citation
GB/T 7714
Dong, Xiaochun,Du, Chunlei,Wang, Changtao,et al. Mask-shift filtering for forming microstructures with irregular profile[J]. APPLIED PHYSICS LETTERS,2006,89(26).
APA Dong, Xiaochun,Du, Chunlei,Wang, Changtao,Deng, Qiling,Zhang, Yudong,&Luo, Xiangang.(2006).Mask-shift filtering for forming microstructures with irregular profile.APPLIED PHYSICS LETTERS,89(26).
MLA Dong, Xiaochun,et al."Mask-shift filtering for forming microstructures with irregular profile".APPLIED PHYSICS LETTERS 89.26(2006).
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