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Electronic transport characterization of silicon wafers by laterally resolved free-carrier absorption and multiparameter fitting
Zhang, Xiren; Li, Bincheng; Gao, Chunming
Source PublicationAPPLIED PHYSICS LETTERS
Volume89Issue:11
2006-09-11
Language英语
Indexed BySCI
WOS IDWOS:000240545400069
SubtypeArticle
AbstractLaterally resolved modulated free-carrier absorption (MFCA) is applied to the simultaneous determination of the electronic transport properties of semiconductor wafers. A rigorous three-dimensional carrier diffusion model is used to fit the observed dependences of the MFCA signal amplitude and phase on the separation between the pump and probe laser spots, measured at several modulation frequencies covering an appropriate range. This leads to a simultaneous and unambiguous determination of the values of three transport parameters, namely, the minority-carrier lifetime tau, the carrier diffusivity D, and the front surface recombination velocity s(1). The extracted values for a n-type Si wafer with a resistivity of 7-10 Omega cm are 53 mu s (tau), 16.6 cm(2)/s (D), and < 200 cm/s (s(1)), respectively. (c) 2006 American Institute of Physics.
WOS KeywordSURFACE RECOMBINATION VELOCITY ; PHOTOTHERMAL MICROSCOPY ; BULK LIFETIME ; RADIOMETRY ; SUBSTRATE
WOS Research AreaPhysics
WOS SubjectPhysics, Applied
Citation statistics
Cited Times:29[WOS]   [WOS Record]     [Related Records in WOS]
Document Type期刊论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/3539
Collection光电技术研究所被WoS收录文章
AffiliationChinese Acad Sci, Inst Opt & Elect, Chengdu 610209, Sichuan, Peoples R China
Recommended Citation
GB/T 7714
Zhang, Xiren,Li, Bincheng,Gao, Chunming. Electronic transport characterization of silicon wafers by laterally resolved free-carrier absorption and multiparameter fitting[J]. APPLIED PHYSICS LETTERS,2006,89(11).
APA Zhang, Xiren,Li, Bincheng,&Gao, Chunming.(2006).Electronic transport characterization of silicon wafers by laterally resolved free-carrier absorption and multiparameter fitting.APPLIED PHYSICS LETTERS,89(11).
MLA Zhang, Xiren,et al."Electronic transport characterization of silicon wafers by laterally resolved free-carrier absorption and multiparameter fitting".APPLIED PHYSICS LETTERS 89.11(2006).
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