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Electrical and optical properties of lanthanum-modified lead zirconate titanate thin films by radio-frequency magnetron sputtering
Leng, W. J.; Yang, C. R.; Ji, H.; Zhang, J. H.; Tang, J. L.; Chen, H. W.; Gao, L. F.
Source PublicationJOURNAL OF APPLIED PHYSICS
Volume100Issue:10
2006-11-15
Language英语
Indexed BySCI
WOS IDWOS:000242408000114
SubtypeArticle
Abstract(Pb,La)(Zr,Ti)O-3 (PLZT) thin films were grown on Pt/Ti/SiO2/Si and fused quartz substrates by radio-frequency magnetron sputtering at 650 degrees C. X-ray diffraction analysis shows that the PLZT films are polycrystalline with (100)-preferential orientation. The Al/PLZT/Pt capacitors have been fabricated and show good ferroelectric properties with the remanent polarization of 24.3 mu C/cm(2) and coercive field of 142 kV/cm. The leakage current density is only about 0.86x10(-7) A/cm(2) at 200 kV/cm. The energy gap E-g of the films is estimated to be about 3.54 eV by optical transmittance measurements. Their fundamental optical constants are obtained by a Filmetrics F20 reflectance spectrometer (F20). These results show that the PLZT ferroelectric thin films are promising materials for optoelectronic devices. (c) 2006 American Institute of Physics.
WOS KeywordPULSED-LASER DEPOSITION ; PB
WOS Research AreaPhysics
WOS SubjectPhysics, Applied
Citation statistics
Cited Times:3[WOS]   [WOS Record]     [Related Records in WOS]
Document Type期刊论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/3534
Collection光电技术研究所被WoS收录文章
Affiliation1.Univ Elect Sci & Technol China, State Key Lab Elect Thin Films & Integrated Devic, Chengdu 610054, Peoples R China
2.Chinese Acad Sci, Inst Opt & Elect, Chengdu 610209, Peoples R China
Recommended Citation
GB/T 7714
Leng, W. J.,Yang, C. R.,Ji, H.,et al. Electrical and optical properties of lanthanum-modified lead zirconate titanate thin films by radio-frequency magnetron sputtering[J]. JOURNAL OF APPLIED PHYSICS,2006,100(10).
APA Leng, W. J..,Yang, C. R..,Ji, H..,Zhang, J. H..,Tang, J. L..,...&Gao, L. F..(2006).Electrical and optical properties of lanthanum-modified lead zirconate titanate thin films by radio-frequency magnetron sputtering.JOURNAL OF APPLIED PHYSICS,100(10).
MLA Leng, W. J.,et al."Electrical and optical properties of lanthanum-modified lead zirconate titanate thin films by radio-frequency magnetron sputtering".JOURNAL OF APPLIED PHYSICS 100.10(2006).
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