The nanoscopy of the spatial distribution due to the interference of surface-plasmon polaritons (SPPs) on metallic nanostructures has been studied. The results show that the wavelength of plasmon wave becomes short when the thickness of the metallic film decreases because of SPPs coupling on both sides of the metallic structure. The interference of SPPs on the exit side of metallic nanostructures can redistribute the illumination light into nanoscale spatial distribution with high intensity, which beats the Rayleigh diffraction limit. The spatial resolution of sub-50-nm pattern on a metallic nanostructure with a thickness of 60 nm was experimentally measured by using a traditional photoresist with an illumination wavelength of 436 urn, which verifies the theoretical predictions. The information of the near-field distribution from corrugated metallic nanostructures is important for understanding the underlying physics, as well as for optimizing metallic nanostructures for possible applications. (c) 2006 American Vacuum Society.