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Analysis of atom focusing in a standing wave laser field for nanometer-scale fabrication
Chen, XZ; Shi, JP; Luo, XG; Zhang, CM; Chen, XN; Xing, TW; Du, CL; Yao, HM
Source PublicationMODERN PHYSICS LETTERS B
Volume20Issue:4Pages:179-187
2006-02-10
Language英语
Indexed BySCI
WOS IDWOS:000235741300005
SubtypeArticle
AbstractWe present a calculation model to investigate the focusing characteristics of an atomic beam in a laser standing wave, taking the wave nature of the atomic propagation into account. The effects of atom source, optical parameters of the laser field and the substrate position on atom focusing axe analyzed. Numerical simulations indicate that the best focusing performance can be obtained by repositioning the substrate or optimizing the longitudinal atomic beam speed, laser intensity and the detuning of the laser beam. The feature width of the nanostructure is mainly determined by the transverse speed distribution of atoms. Some methods for optimizing experimental parameters are suggested.
KeywordAtom And Neutron Optics Mechanical Effects Of Light On Atoms Fabrication Techniques Molecules And Ions Lithography Pattern Transfer
WOS KeywordLIGHT ; DEPOSITION ; LITHOGRAPHY ; OPTICS
WOS Research AreaPhysics
WOS SubjectPhysics, Applied ; Physics, Condensed Matter ; Physics, Mathematical
Citation statistics
Cited Times:1[WOS]   [WOS Record]     [Related Records in WOS]
Document Type期刊论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/3529
Collection光电技术研究所被WoS收录文章
AffiliationChinese Acad Sci, Inst Opt & Elect, State Key Lab Opt Technol Microfabricat, Chengdu 610209, Peoples R China
Recommended Citation
GB/T 7714
Chen, XZ,Shi, JP,Luo, XG,et al. Analysis of atom focusing in a standing wave laser field for nanometer-scale fabrication[J]. MODERN PHYSICS LETTERS B,2006,20(4):179-187.
APA Chen, XZ.,Shi, JP.,Luo, XG.,Zhang, CM.,Chen, XN.,...&Yao, HM.(2006).Analysis of atom focusing in a standing wave laser field for nanometer-scale fabrication.MODERN PHYSICS LETTERS B,20(4),179-187.
MLA Chen, XZ,et al."Analysis of atom focusing in a standing wave laser field for nanometer-scale fabrication".MODERN PHYSICS LETTERS B 20.4(2006):179-187.
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