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题名:
A high precision dynamic autocollimator
作者: Shen, MZ; Liao, S
刊名: MEASUREMENT TECHNOLOGY AND INTELLIGENT INSTRUMENTS VI
出版日期: 2005
卷号: 295-296, 页码:337-342
关键词: non-contact measurement ; optical measurement ; angular measurement ; dynamic autocollimator
文章类型: Article
英文摘要: In order to increase the precision of a high speed dynamic autocollimator, which uses quadrate detector, we propose a new method to compensate the residual measuring errors. For this purpose, a multi-tooth rotary table with precision of 0.2 seconds of are is used to calibrate the autocollimator. From the calibration data, a polynomial interpolation compensation algorithm is used. As a result, the measuring accuracy is increased to the order of 0.8 seconds of arc and the sampling speed is not affected.
WOS标题词: Science & Technology ; Technology
类目[WOS]: Materials Science, Ceramics ; Materials Science, Composites
研究领域[WOS]: Materials Science
收录类别: SCI
语种: 英语
WOS记录号: WOS:000231595000055
Citation statistics:
内容类型: 期刊论文
URI标识: http://ir.ioe.ac.cn/handle/181551/3518
Appears in Collections:光电技术研究所被WoS收录文章_期刊论文

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作者单位: Chinese Acad Sci, Inst Opt & Elect, Chengdu, Peoples R China

Recommended Citation:
Shen, MZ,Liao, S. A high precision dynamic autocollimator[J]. MEASUREMENT TECHNOLOGY AND INTELLIGENT INSTRUMENTS VI,2005,295-296:337-342.
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