IOE OpenIR  > 光电技术研究所被WoS收录文章
Influence of vignetting on signal analysis of photocarrier radiometry of semiconductor wafers
Li, BC; Shaughnessy, D; Mandelis, A
Source PublicationREVIEW OF SCIENTIFIC INSTRUMENTS
Volume76Issue:6
2005-06-01
Language英语
Indexed BySCI
WOS IDWOS:000229962000058
SubtypeArticle
AbstractThe influence of vignetting on the photocarrier radiometry (PCR) measurements of semiconductor wafers has been investigated both theoretically and experimentally by analyzing the vignetting effect on the PCR amplitude and on the frequency dependence of the PCR amplitude and phase. The vignetting effect significantly reduces the PCR amplitude and modifies the frequency dependencies that are widely used to extract simultaneously the electronic transport properties (that is, the carrier lifetime, the carrier diffusion coefficient, and the front and rear surface recombination velocities) of semiconductor wafers. When using the frequency dependence of the PCR signal to determine the transport properties, the effect of vignetting can be accounted for by an "effective detector size"-a reduced detector size determined by the actual detector size and the vignetting effect. (c) 2005 American Institute of Physics.
WOS KeywordINFRARED PHOTOTHERMAL MICROSCOPY ; SILICON-WAFERS ; SI WAFERS ; TRANSPORT-PROPERTIES ; CARRIER-LIFETIME ; DEPENDENCE ; DIFFRACTION
WOS Research AreaInstruments & Instrumentation ; Physics
WOS SubjectInstruments & Instrumentation ; Physics, Applied
Citation statistics
Cited Times:5[WOS]   [WOS Record]     [Related Records in WOS]
Document Type期刊论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/3512
Collection光电技术研究所被WoS收录文章
Affiliation1.Chinese Acad Sci, Inst Opt & Elect, Chengdu 610209, Peoples R China
2.Univ Toronto, CADIFT, Dept Mech & Ind Engn, Toronto, ON M5S 3G8, Canada
Recommended Citation
GB/T 7714
Li, BC,Shaughnessy, D,Mandelis, A. Influence of vignetting on signal analysis of photocarrier radiometry of semiconductor wafers[J]. REVIEW OF SCIENTIFIC INSTRUMENTS,2005,76(6).
APA Li, BC,Shaughnessy, D,&Mandelis, A.(2005).Influence of vignetting on signal analysis of photocarrier radiometry of semiconductor wafers.REVIEW OF SCIENTIFIC INSTRUMENTS,76(6).
MLA Li, BC,et al."Influence of vignetting on signal analysis of photocarrier radiometry of semiconductor wafers".REVIEW OF SCIENTIFIC INSTRUMENTS 76.6(2005).
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