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Semi-classical simulation of atomic deposition in a standing wave laser field
Chen, XZ; Yao, HM; Chen, XN; Zhang, CM
Source PublicationMODERN PHYSICS LETTERS B
Volume18Issue:5-6Pages:233-239
2004-03-12
Language英语
Indexed BySCI
WOS IDWOS:000221809900006
SubtypeArticle
AbstractAn atom lens generated by a near-resonant light standing wave can be used to produce nanometer-scale structures. Our calculations are based on a Monte Carlo scheme and the trajectory tracing method. The influences of optical potential and source imperfection such as velocity spread and beam spread on the shape of chromium feature are analyzed using this approach. Results have shown that the focus depth for real source is longer than that for perfect source. Feature separation can be reduced by changing the detuning of the standing wave laser field from blue to red halfway through the deposition time.
KeywordAtom Focusing Nanofabrication Atom-laser Interaction
WOS KeywordLITHOGRAPHY ; LIGHT ; LENS
WOS Research AreaPhysics
WOS SubjectPhysics, Applied ; Physics, Condensed Matter ; Physics, Mathematical
Citation statistics
Cited Times:4[WOS]   [WOS Record]     [Related Records in WOS]
Document Type期刊论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/3501
Collection光电技术研究所被WoS收录文章
AffiliationChinese Acad Sci, Inst Opt & Elect, State Key Lab Opt Technol Microfabricat, Chengdu 610209, Peoples R China
Recommended Citation
GB/T 7714
Chen, XZ,Yao, HM,Chen, XN,et al. Semi-classical simulation of atomic deposition in a standing wave laser field[J]. MODERN PHYSICS LETTERS B,2004,18(5-6):233-239.
APA Chen, XZ,Yao, HM,Chen, XN,&Zhang, CM.(2004).Semi-classical simulation of atomic deposition in a standing wave laser field.MODERN PHYSICS LETTERS B,18(5-6),233-239.
MLA Chen, XZ,et al."Semi-classical simulation of atomic deposition in a standing wave laser field".MODERN PHYSICS LETTERS B 18.5-6(2004):233-239.
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