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题名:
Semi-classical simulation of atomic deposition in a standing wave laser field
作者: Chen, XZ; Yao, HM; Chen, XN; Zhang, CM
刊名: MODERN PHYSICS LETTERS B
出版日期: 2004-03-12
卷号: 18, 期号:5-6, 页码:233-239
关键词: atom focusing ; nanofabrication ; atom-laser interaction
文章类型: Article
英文摘要: An atom lens generated by a near-resonant light standing wave can be used to produce nanometer-scale structures. Our calculations are based on a Monte Carlo scheme and the trajectory tracing method. The influences of optical potential and source imperfection such as velocity spread and beam spread on the shape of chromium feature are analyzed using this approach. Results have shown that the focus depth for real source is longer than that for perfect source. Feature separation can be reduced by changing the detuning of the standing wave laser field from blue to red halfway through the deposition time.
WOS标题词: Science & Technology ; Physical Sciences
类目[WOS]: Physics, Applied ; Physics, Condensed Matter ; Physics, Mathematical
研究领域[WOS]: Physics
关键词[WOS]: LITHOGRAPHY ; LIGHT ; LENS
收录类别: SCI
语种: 英语
WOS记录号: WOS:000221809900006
Citation statistics:
内容类型: 期刊论文
URI标识: http://ir.ioe.ac.cn/handle/181551/3501
Appears in Collections:光电技术研究所被WoS收录文章_期刊论文

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作者单位: Chinese Acad Sci, Inst Opt & Elect, State Key Lab Opt Technol Microfabricat, Chengdu 610209, Peoples R China

Recommended Citation:
Chen, XZ,Yao, HM,Chen, XN,et al. Semi-classical simulation of atomic deposition in a standing wave laser field[J]. MODERN PHYSICS LETTERS B,2004,18(5-6):233-239.
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