中国科学院光电技术研究所机构知识库
Advanced  
IOE OpenIR  > 光电技术研究所被WoS收录文章  > 期刊论文
题名:
Refractive micro lens array made of dichromate gelatin with gray-tone photolithography
作者: Yao, J; Cui, Z; Gao, FH; Zhang, YX; Guo, YK; Du, CL; Zeng, HJ; Qiu, CK
刊名: MICROELECTRONIC ENGINEERING
出版日期: 2001-09-01
卷号: 57-8, 页码:729-735
关键词: micro-optics element ; refractive microlens ; gray-tone photolithography ; dichromate gelatin ; enzyme
文章类型: Article
英文摘要: A novel method is proposed to fabricate refractive micro lens array using dichromate gelatin (DCG) and an enzyme. DCG has optical properties similar to glass but is sensitive to UV light. The enzyme solution is used to develop the optically exposed DCG instead of a conventional water-isopropanol developer, which greatly enhances the surface relief depth. The continuous surface relief structure is realized by a coded grey-tone mask. A computer program has been developed to code an arbitrary 3D surface relief shape into a grey-tone mask design. The DCG properties and the lithography process are described. The grey-tone coding principle is presented. Unlike the current processes where patterned photoresist relief structure has to be transferred to a substrate material, the fabricated DCG micro lens array can be directly used as an optical element. The new process opens a new route of micro lens fabrication, which is simple and low cost. (C) 2001 Elsevier Science BY All rights reserved.
WOS标题词: Science & Technology ; Technology ; Physical Sciences
类目[WOS]: Engineering, Electrical & Electronic ; Nanoscience & Nanotechnology ; Optics ; Physics, Applied
研究领域[WOS]: Engineering ; Science & Technology - Other Topics ; Optics ; Physics
关键词[WOS]: FABRICATION
收录类别: ISTP ; SCI
语种: 英语
WOS记录号: WOS:000171061800097
Citation statistics:
内容类型: 期刊论文
URI标识: http://ir.ioe.ac.cn/handle/181551/3484
Appears in Collections:光电技术研究所被WoS收录文章_期刊论文

Files in This Item:

There are no files associated with this item.


作者单位: 1.Rutherford Appleton Lab, Didcot OX11 0QX, Oxon, England
2.Sichuan Univ, Dept Phys, Chengdu 610064, Peoples R China
3.Chinese Acad Sci, Inst Opt & Elect, Chengdu 610209, Peoples R China

Recommended Citation:
Yao, J,Cui, Z,Gao, FH,et al. Refractive micro lens array made of dichromate gelatin with gray-tone photolithography[J]. MICROELECTRONIC ENGINEERING,2001,57-8:729-735.
Service
Recommend this item
Sava as my favorate item
Show this item's statistics
Export Endnote File
Google Scholar
Similar articles in Google Scholar
[Yao, J]'s Articles
[Cui, Z]'s Articles
[Gao, FH]'s Articles
CSDL cross search
Similar articles in CSDL Cross Search
[Yao, J]‘s Articles
[Cui, Z]‘s Articles
[Gao, FH]‘s Articles
Related Copyright Policies
Null
Social Bookmarking
Add to CiteULike Add to Connotea Add to Del.icio.us Add to Digg Add to Reddit
所有评论 (0)
暂无评论
 
评注功能仅针对注册用户开放,请您登录
您对该条目有什么异议,请填写以下表单,管理员会尽快联系您。
内 容:
Email:  *
单位:
验证码:   刷新
您在IR的使用过程中有什么好的想法或者建议可以反馈给我们。
标 题:
 *
内 容:
Email:  *
验证码:   刷新

Items in IR are protected by copyright, with all rights reserved, unless otherwise indicated.

 

 

Valid XHTML 1.0!
Copyright © 2007-2016  中国科学院光电技术研究所 - Feedback
Powered by CSpace