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题名:
Comparative experimental study on absolute measurement of spherical surface with two-sphere method
作者: Hou, Xi1; Yang, Peng1,2; Wu, Fan1; Wan, Yongjian1
刊名: OPTICS AND LASERS IN ENGINEERING
出版日期: 2011-07-01
卷号: 49, 期号:7, 页码:833-840
关键词: Optical measurement ; Absolute measurement ; Interferometry ; Two-sphere method
文章类型: Article
英文摘要: The two-sphere method with multiple confocal measurements and a "cat's-eye" measurement is used widely in high accuracy interferometry, which can obtain the absolute surface data of the tested spherical surface. We provide a comparative experimental study on absolute testing procedures for spherical surface with two-sphere method, which include the classical Jensen method with three position measurements, the Zygo method with five position measurements and a variant of the Jensen method. The variant of the Jensen method can combine the multiple "three-position" measurements based on the fiducial method and averaging method. The repeatability of the involved absolute measurement methods is also studied by the five set experiments, and the corresponding Zernike fitting coefficients are compared in detail. The experimental results are meaningful for implementation of two-sphere method with higher repeatability in practice. (C) 2011 Elsevier Ltd. All rights reserved.
WOS标题词: Science & Technology ; Physical Sciences
类目[WOS]: Optics
研究领域[WOS]: Optics
关键词[WOS]: FIZEAU INTERFEROMETRY ; CALIBRATION
收录类别: SCI
语种: 英语
WOS记录号: WOS:000291078500012
Citation statistics:
内容类型: 期刊论文
URI标识: http://ir.ioe.ac.cn/handle/181551/3472
Appears in Collections:光电技术研究所被WoS收录文章_期刊论文

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作者单位: 1.Chinese Acad Sci, Inst Opt & Elect, Chengdu 610209, Peoples R China
2.Chinese Acad Sci, Grad Univ, Beijing 100039, Peoples R China

Recommended Citation:
Hou, Xi,Yang, Peng,Wu, Fan,et al. Comparative experimental study on absolute measurement of spherical surface with two-sphere method[J]. OPTICS AND LASERS IN ENGINEERING,2011,49(7):833-840.
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