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Self-eliminating instrumental frequency response from free carrier absorption signals for silicon wafer characterization
Huang, Qiuping1,2; Li, Bincheng1
Source PublicationREVIEW OF SCIENTIFIC INSTRUMENTS
Volume82Issue:4
2011-04-01
Language英语
Indexed BySCI
WOS IDWOS:000290051500004
SubtypeArticle
AbstractAccurate determination of electronic transport properties of semiconductor wafers with modulated free carrier absorption (MFCA) and multiparameter fitting requires the total elimination of instrumental response from the MFCA signals. In this paper, an approach to eliminate the effect of instrumental response on the frequency dependence of MFCA amplitude and phase is developed both theoretically and experimentally to simultaneously determine the transport properties (minority-carrier lifetime, carrier diffusion coefficient, and front surface recombination velocity) of silicon wafers. Experimental results showed that with the proposed method the instrumental frequency response was fully eliminated from the experimental MFCA data and had no impact on the multiparameter fitting, while with conventional methods the accuracy of the fitted transport parameters was influenced detrimentally by the errors of the measured instrumental frequency responses, in particular for the minority-carrier lifetime and the front surface recombination velocity. (C) 2011 American Institute of Physics. [doi:10.1063/1.3577043]
WOS KeywordINFRARED PHOTOCARRIER RADIOMETRY ; ELECTRONIC DEFECT ; AMPLIFICATION ; DEPENDENCE ; MODULATION ; ACCURACY ; CONTRAST ; BEAM
WOS Research AreaInstruments & Instrumentation ; Physics
WOS SubjectInstruments & Instrumentation ; Physics, Applied
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Cited Times:6[WOS]   [WOS Record]     [Related Records in WOS]
Document Type期刊论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/3456
Collection光电技术研究所被WoS收录文章
Affiliation1.Chinese Acad Sci, Inst Opt & Elect, Chengdu 610209, Sichuan, Peoples R China
2.Chinese Acad Sci, Grad Sch, Beijing 100039, Peoples R China
Recommended Citation
GB/T 7714
Huang, Qiuping,Li, Bincheng. Self-eliminating instrumental frequency response from free carrier absorption signals for silicon wafer characterization[J]. REVIEW OF SCIENTIFIC INSTRUMENTS,2011,82(4).
APA Huang, Qiuping,&Li, Bincheng.(2011).Self-eliminating instrumental frequency response from free carrier absorption signals for silicon wafer characterization.REVIEW OF SCIENTIFIC INSTRUMENTS,82(4).
MLA Huang, Qiuping,et al."Self-eliminating instrumental frequency response from free carrier absorption signals for silicon wafer characterization".REVIEW OF SCIENTIFIC INSTRUMENTS 82.4(2011).
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