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An electrostatic MEMS spring actuator with large stroke and out-of-plane actuation
Hu, Fangrong2; Wang, Weimin1; Yao, Jun1
Source PublicationJOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume21Issue:11
2011-11-01
Language英语
Indexed BySCI
WOS IDWOS:000296771900029
SubtypeArticle
AbstractA microelectromechanical system (MEMS) spring actuator based on the electrostatic repulsive force is presented. In general, an electrostatic-attractive-force-based actuator has a small stroke because instability results from the electrostatic pull-in effect. Therefore, a great deal of effort has been made to achieve large strokes for various applications. Based on the fact that an asymmetric electric field can produce an electrostatic repulsive force, an out-of-plane actuator has been demonstrated in this paper. The actuator consists of two layers which are parallel to each other. The top layer contains a central mass with a size of 100 mu m x 100 mu m x 2 mu m, and it is suspended by a folding spring. The second layer is fixed to the substrate and works as the bottom electrodes of the actuator. The impacting factors to the repulsive force which consequently affect the displacement of the actuator are analyzed using finite element analysis software, and the optimal structure parameters have been obtained. The actuator is fabricated by the poly-multi-user-MEMS-process (PolyMUMPs); the measured out-of-plane displacement of this actuator reaches 2.7 mu m at 50 V dc, and it shows good agreement with the simulation.
WOS KeywordMICROMIRRORS ; FABRICATION ; SYSTEM
WOS Research AreaEngineering ; Science & Technology - Other Topics ; Instruments & Instrumentation ; Materials Science ; Mechanics
WOS SubjectEngineering, Electrical & Electronic ; Nanoscience & Nanotechnology ; Instruments & Instrumentation ; Materials Science, Multidisciplinary ; Mechanics
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Cited Times:14[WOS]   [WOS Record]     [Related Records in WOS]
Document Type期刊论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/3451
Collection光电技术研究所被WoS收录文章
Affiliation1.Chinese Acad Sci, State Key Lab Opt Technol Microfabricat, Inst Opt & Elect, Chengdu 610209, Peoples R China
2.Guilin Univ Elect Technol, Coll Elect Engn & Automatizat, Guilin 541004, Peoples R China
Recommended Citation
GB/T 7714
Hu, Fangrong,Wang, Weimin,Yao, Jun. An electrostatic MEMS spring actuator with large stroke and out-of-plane actuation[J]. JOURNAL OF MICROMECHANICS AND MICROENGINEERING,2011,21(11).
APA Hu, Fangrong,Wang, Weimin,&Yao, Jun.(2011).An electrostatic MEMS spring actuator with large stroke and out-of-plane actuation.JOURNAL OF MICROMECHANICS AND MICROENGINEERING,21(11).
MLA Hu, Fangrong,et al."An electrostatic MEMS spring actuator with large stroke and out-of-plane actuation".JOURNAL OF MICROMECHANICS AND MICROENGINEERING 21.11(2011).
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