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题名:
An electrostatic MEMS spring actuator with large stroke and out-of-plane actuation
作者: Hu, Fangrong2; Wang, Weimin1; Yao, Jun1
刊名: JOURNAL OF MICROMECHANICS AND MICROENGINEERING
出版日期: 2011-11-01
卷号: 21, 期号:11
文章类型: Article
英文摘要: A microelectromechanical system (MEMS) spring actuator based on the electrostatic repulsive force is presented. In general, an electrostatic-attractive-force-based actuator has a small stroke because instability results from the electrostatic pull-in effect. Therefore, a great deal of effort has been made to achieve large strokes for various applications. Based on the fact that an asymmetric electric field can produce an electrostatic repulsive force, an out-of-plane actuator has been demonstrated in this paper. The actuator consists of two layers which are parallel to each other. The top layer contains a central mass with a size of 100 mu m x 100 mu m x 2 mu m, and it is suspended by a folding spring. The second layer is fixed to the substrate and works as the bottom electrodes of the actuator. The impacting factors to the repulsive force which consequently affect the displacement of the actuator are analyzed using finite element analysis software, and the optimal structure parameters have been obtained. The actuator is fabricated by the poly-multi-user-MEMS-process (PolyMUMPs); the measured out-of-plane displacement of this actuator reaches 2.7 mu m at 50 V dc, and it shows good agreement with the simulation.
WOS标题词: Science & Technology ; Technology
类目[WOS]: Engineering, Electrical & Electronic ; Nanoscience & Nanotechnology ; Instruments & Instrumentation ; Materials Science, Multidisciplinary ; Mechanics
研究领域[WOS]: Engineering ; Science & Technology - Other Topics ; Instruments & Instrumentation ; Materials Science ; Mechanics
关键词[WOS]: MICROMIRRORS ; FABRICATION ; SYSTEM
收录类别: SCI
语种: 英语
WOS记录号: WOS:000296771900029
Citation statistics:
内容类型: 期刊论文
URI标识: http://ir.ioe.ac.cn/handle/181551/3451
Appears in Collections:光电技术研究所被WoS收录文章_期刊论文

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作者单位: 1.Chinese Acad Sci, State Key Lab Opt Technol Microfabricat, Inst Opt & Elect, Chengdu 610209, Peoples R China
2.Guilin Univ Elect Technol, Coll Elect Engn & Automatizat, Guilin 541004, Peoples R China

Recommended Citation:
Hu, Fangrong,Wang, Weimin,Yao, Jun. An electrostatic MEMS spring actuator with large stroke and out-of-plane actuation[J]. JOURNAL OF MICROMECHANICS AND MICROENGINEERING,2011,21(11).
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