IOE OpenIR  > 光电技术研究所被WoS收录文章
An out-of-plane electrostatic actuator based on the lever principle
Ren, Hao1,2; Tao, Fenggang1,2; Wang, Weimin1; Yao, Jun1
Source PublicationJOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume21Issue:4
2011-04-01
Language英语
Indexed BySCI
WOS IDWOS:000288751400021
SubtypeArticle
AbstractA MEMS electrostatic actuator based on the lever principle, which aims to obtain a large out-of-plane displacement and has a simple structure and fabrication process is presented in this paper. The two-layer lever actuator consists of four individual levers, each of which is actuated by electrostatic attractive force to produce a downward displacement on the short arm of the lever. This displacement is amplified by the lever to achieve a larger upward displacement on the end of the long arm. A theoretical model of the lever actuator is brought forward, based on the energy method, and is verified by finite-element analysis. The discussions about the key factors related to the characteristics of the structure are also included, from which we acquired the structure parameters for fabrication. Compared with previous studies, the theoretical model and the detailed discussions make the analysis of the out-of-plane actuator based on the lever principle more general. An electrostatic actuator 503 x 503 mu m with a central mass of 40 x 40 mu m is fabricated using a two-layer surface fabrication process. The measured out-of-plane displacement is about 1.45 mu m at a voltage of 47 V; more than double the displacement of a conventional electrostatic attractive parallel plate actuator by the same fabrication process. The possible applications of this actuator are micro-switches, micro-capacitors and micro-mirrors in optical communication and adaptive optics systems.
WOS KeywordCOMB-DRIVE ACTUATORS ; LARGE-SCAN-ANGLE ; ADAPTIVE OPTICS ; MEMS ; DESIGN ; MIRROR ; MICROMIRROR ; FABRICATION ; ARRAY
WOS Research AreaEngineering ; Science & Technology - Other Topics ; Instruments & Instrumentation ; Materials Science ; Mechanics
WOS SubjectEngineering, Electrical & Electronic ; Nanoscience & Nanotechnology ; Instruments & Instrumentation ; Materials Science, Multidisciplinary ; Mechanics
Citation statistics
Cited Times:12[WOS]   [WOS Record]     [Related Records in WOS]
Document Type期刊论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/3420
Collection光电技术研究所被WoS收录文章
Affiliation1.Chinese Acad Sci, Inst Opt & Elect, State Key Lab Opt Technol Microfabricat, Chengdu 610209, Peoples R China
2.Chinese Acad Sci, Grad Univ, Beijing 100039, Peoples R China
Recommended Citation
GB/T 7714
Ren, Hao,Tao, Fenggang,Wang, Weimin,et al. An out-of-plane electrostatic actuator based on the lever principle[J]. JOURNAL OF MICROMECHANICS AND MICROENGINEERING,2011,21(4).
APA Ren, Hao,Tao, Fenggang,Wang, Weimin,&Yao, Jun.(2011).An out-of-plane electrostatic actuator based on the lever principle.JOURNAL OF MICROMECHANICS AND MICROENGINEERING,21(4).
MLA Ren, Hao,et al."An out-of-plane electrostatic actuator based on the lever principle".JOURNAL OF MICROMECHANICS AND MICROENGINEERING 21.4(2011).
Files in This Item:
There are no files associated with this item.
Related Services
Recommend this item
Bookmark
Usage statistics
Export to Endnote
Google Scholar
Similar articles in Google Scholar
[Ren, Hao]'s Articles
[Tao, Fenggang]'s Articles
[Wang, Weimin]'s Articles
Baidu academic
Similar articles in Baidu academic
[Ren, Hao]'s Articles
[Tao, Fenggang]'s Articles
[Wang, Weimin]'s Articles
Bing Scholar
Similar articles in Bing Scholar
[Ren, Hao]'s Articles
[Tao, Fenggang]'s Articles
[Wang, Weimin]'s Articles
Terms of Use
No data!
Social Bookmark/Share
All comments (0)
No comment.
 

Items in the repository are protected by copyright, with all rights reserved, unless otherwise indicated.