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题名:
Measurement of influence function using swing arm profilometer and laser tracker
作者: Jing, Hongwei1; King, Christopher2; Walker, David
刊名: OPTICS EXPRESS
出版日期: 2010-03-01
卷号: 18, 期号:5, 页码:5271-5281
文章类型: Article
英文摘要: We present a novel method to accurately measure 3D polishing influence functions by using a swing arm profilometer (SAP) and a laser tracker. The laser tracker is used to align the SAP and measure the parameters of the SAP setup before measuring the influence function. The instruments and the measurement method are described, together with measurement uncertainty analysis. An influence function deliberately produced with asymmetric form in order to create a challenging test is measured, and compared with that of a commercial 3D profilometer. The SAP result is 48.2 mu m in PV, 7.271mm(3) in volume. The 3D profilometer result is 48.4 mu m in PV, 7.289mm(3) in volume. The forms of the two results show excellent correlation. This gives confidence of the viability of the SAP method for larger influence functions out of range of the commercial instrument. (C) 2010 Optical Society of America
WOS标题词: Science & Technology ; Physical Sciences
类目[WOS]: Optics
研究领域[WOS]: Optics
关键词[WOS]: MIRROR-SEGMENTS ; SIMULATION
收录类别: SCI
语种: 英语
WOS记录号: WOS:000275454100041
Citation statistics:
内容类型: 期刊论文
URI标识: http://ir.ioe.ac.cn/handle/181551/3386
Appears in Collections:光电技术研究所被WoS收录文章_期刊论文

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作者单位: 1.Chinese Acad Sci, Inst Opt & Elect, Chengdu 610209, Peoples R China
2.Univ Coll London, Natl Facil Ultraprecis Surfaces, OpTIC Technium, St Asaph LL17 0JD, North Wales, Wales

Recommended Citation:
Jing, Hongwei,King, Christopher,Walker, David. Measurement of influence function using swing arm profilometer and laser tracker[J]. OPTICS EXPRESS,2010,18(5):5271-5281.
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