IOE OpenIR  > 光电技术研究所被WoS收录文章
Nanolithography method by using localized surface plasmon mask generated with polydimethylsiloxane soft mold on thin metal film
Zhang, Yukun1,2; Dong, Xiaochun1; Du, Jinglei2; Wei, Xingzhan1; Shi, Lifang1; Deng, Qiling1; Du, Chunlei1
Source PublicationOPTICS LETTERS
Volume35Issue:13Pages:2143-2145
2010-07-01
Language英语
Indexed BySCI
WOS IDWOS:000279435900011
SubtypeArticle
AbstractWe propose a photolithographic method to fabricate nanostructures by employing a localized surface plasmon (LSP) mask generated by a soft mold on a thin metal film. The soft mold can be formed by transparent materials, such as polydimethylsiloxane, contacting firmly to the metal film. The pattern edges of the mold, serving as the fine tapers, can be used to excite LSPs and accumulate a large amount of localized energy from the incident light field, providing a modulated optical field in the resist with nanometer feature size. Nanolithographic results with a minimum feature size of 30 nm are demonstrated. (C) 2010 Optical Society of America
WOS KeywordOPTICAL LITHOGRAPHY ; BEAM LITHOGRAPHY ; NANOFABRICATION ; METAMATERIALS ; SUPERLENS
WOS Research AreaOptics
WOS SubjectOptics
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Document Type期刊论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/3359
Collection光电技术研究所被WoS收录文章
Affiliation1.Chinese Acad Sci, Inst Opt & Elect, State Key Lab Opt Technol Microfabricat, Chengdu 610209, Peoples R China
2.Sichuan Univ, Dept Phys, Chengdu 610064, Peoples R China
Recommended Citation
GB/T 7714
Zhang, Yukun,Dong, Xiaochun,Du, Jinglei,et al. Nanolithography method by using localized surface plasmon mask generated with polydimethylsiloxane soft mold on thin metal film[J]. OPTICS LETTERS,2010,35(13):2143-2145.
APA Zhang, Yukun.,Dong, Xiaochun.,Du, Jinglei.,Wei, Xingzhan.,Shi, Lifang.,...&Du, Chunlei.(2010).Nanolithography method by using localized surface plasmon mask generated with polydimethylsiloxane soft mold on thin metal film.OPTICS LETTERS,35(13),2143-2145.
MLA Zhang, Yukun,et al."Nanolithography method by using localized surface plasmon mask generated with polydimethylsiloxane soft mold on thin metal film".OPTICS LETTERS 35.13(2010):2143-2145.
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