中国科学院光电技术研究所机构知识库
Advanced  
IOE OpenIR  > 光电技术研究所被WoS收录文章  > 期刊论文
题名:
Nanolithography method by using localized surface plasmon mask generated with polydimethylsiloxane soft mold on thin metal film
作者: Zhang, Yukun1,2; Dong, Xiaochun1; Du, Jinglei2; Wei, Xingzhan1; Shi, Lifang1; Deng, Qiling1; Du, Chunlei1
刊名: OPTICS LETTERS
出版日期: 2010-07-01
卷号: 35, 期号:13, 页码:2143-2145
文章类型: Article
英文摘要: We propose a photolithographic method to fabricate nanostructures by employing a localized surface plasmon (LSP) mask generated by a soft mold on a thin metal film. The soft mold can be formed by transparent materials, such as polydimethylsiloxane, contacting firmly to the metal film. The pattern edges of the mold, serving as the fine tapers, can be used to excite LSPs and accumulate a large amount of localized energy from the incident light field, providing a modulated optical field in the resist with nanometer feature size. Nanolithographic results with a minimum feature size of 30 nm are demonstrated. (C) 2010 Optical Society of America
WOS标题词: Science & Technology ; Physical Sciences
类目[WOS]: Optics
研究领域[WOS]: Optics
关键词[WOS]: OPTICAL LITHOGRAPHY ; BEAM LITHOGRAPHY ; NANOFABRICATION ; METAMATERIALS ; SUPERLENS
收录类别: SCI
语种: 英语
WOS记录号: WOS:000279435900011
Citation statistics:
内容类型: 期刊论文
URI标识: http://ir.ioe.ac.cn/handle/181551/3359
Appears in Collections:光电技术研究所被WoS收录文章_期刊论文

Files in This Item:

There are no files associated with this item.


作者单位: 1.Chinese Acad Sci, Inst Opt & Elect, State Key Lab Opt Technol Microfabricat, Chengdu 610209, Peoples R China
2.Sichuan Univ, Dept Phys, Chengdu 610064, Peoples R China

Recommended Citation:
Zhang, Yukun,Dong, Xiaochun,Du, Jinglei,et al. Nanolithography method by using localized surface plasmon mask generated with polydimethylsiloxane soft mold on thin metal film[J]. OPTICS LETTERS,2010,35(13):2143-2145.
Service
Recommend this item
Sava as my favorate item
Show this item's statistics
Export Endnote File
Google Scholar
Similar articles in Google Scholar
[Zhang, Yukun]'s Articles
[Dong, Xiaochun]'s Articles
[Du, Jinglei]'s Articles
CSDL cross search
Similar articles in CSDL Cross Search
[Zhang, Yukun]‘s Articles
[Dong, Xiaochun]‘s Articles
[Du, Jinglei]‘s Articles
Related Copyright Policies
Null
Social Bookmarking
Add to CiteULike Add to Connotea Add to Del.icio.us Add to Digg Add to Reddit
所有评论 (0)
暂无评论
 
评注功能仅针对注册用户开放,请您登录
您对该条目有什么异议,请填写以下表单,管理员会尽快联系您。
内 容:
Email:  *
单位:
验证码:   刷新
您在IR的使用过程中有什么好的想法或者建议可以反馈给我们。
标 题:
 *
内 容:
Email:  *
验证码:   刷新

Items in IR are protected by copyright, with all rights reserved, unless otherwise indicated.

 

 

Valid XHTML 1.0!
Copyright © 2007-2016  中国科学院光电技术研究所 - Feedback
Powered by CSpace