中国科学院光电技术研究所机构知识库
Advanced  
IOE OpenIR  > 光电技术研究所被WoS收录文章  > 期刊论文
题名:
A MEMS micromirror driven by electrostatic force
作者: Hu, Fangrong1,2; Yao, Jun1; Qiu, Chuankai1; Ren, Hao1
刊名: JOURNAL OF ELECTROSTATICS
出版日期: 2010-06-01
卷号: 68, 期号:3, 页码:237-242
关键词: MEMS ; Micromirror ; Electrostatic force ; Pull-in effect ; Large stroke ; Out of plane actuation
文章类型: Article
英文摘要: A microelectromechanical systems (MEMS) micromirror is demonstrated in this paper. The micromirror is actuated by an electrostatic force and can achieve a large out of plane stroke by eliminating the electrostatic pull-in effect. The micromirror consists of a mirror of 400 mu m by 400 mu m in the center, a spring and three fixed bottom electrodes each side. Design principles and the analytical model are both developed, and they are verified by finite element analysis (FEA). The resonant frequency for the piston movement of the designed micromirror is about 2.5 kHz by FEA simulation. The micromirror prototype has been fabricated by a surface micromachining process and it is successfully tested using a microsystem analyzer. An out of plane stroke of 1.65 mu m is observed at 100 V and it agrees well with the predicted result from analytical model. (c) 2010 Elsevier B.V. All rights reserved.
WOS标题词: Science & Technology ; Technology
类目[WOS]: Engineering, Electrical & Electronic
研究领域[WOS]: Engineering
关键词[WOS]: ADAPTIVE OPTICS ; DEFORMABLE MIRROR ; MEMBRANE ; ACTUATOR ; ARRAYS
收录类别: SCI
语种: 英语
WOS记录号: WOS:000278577200005
Citation statistics:
内容类型: 期刊论文
URI标识: http://ir.ioe.ac.cn/handle/181551/3350
Appears in Collections:光电技术研究所被WoS收录文章_期刊论文

Files in This Item:

There are no files associated with this item.


作者单位: 1.Chinese Acad Sci, Inst Opt & Elect, State Key Lab Opt Technol Microfabricat, Chengdu 610209, Peoples R China
2.Guilin Univ Elect Technol, Dept Elect Engn, Guilin 541004, Peoples R China

Recommended Citation:
Hu, Fangrong,Yao, Jun,Qiu, Chuankai,et al. A MEMS micromirror driven by electrostatic force[J]. JOURNAL OF ELECTROSTATICS,2010,68(3):237-242.
Service
Recommend this item
Sava as my favorate item
Show this item's statistics
Export Endnote File
Google Scholar
Similar articles in Google Scholar
[Hu, Fangrong]'s Articles
[Yao, Jun]'s Articles
[Qiu, Chuankai]'s Articles
CSDL cross search
Similar articles in CSDL Cross Search
[Hu, Fangrong]‘s Articles
[Yao, Jun]‘s Articles
[Qiu, Chuankai]‘s Articles
Related Copyright Policies
Null
Social Bookmarking
Add to CiteULike Add to Connotea Add to Del.icio.us Add to Digg Add to Reddit
所有评论 (0)
暂无评论
 
评注功能仅针对注册用户开放,请您登录
您对该条目有什么异议,请填写以下表单,管理员会尽快联系您。
内 容:
Email:  *
单位:
验证码:   刷新
您在IR的使用过程中有什么好的想法或者建议可以反馈给我们。
标 题:
 *
内 容:
Email:  *
验证码:   刷新

Items in IR are protected by copyright, with all rights reserved, unless otherwise indicated.

 

 

Valid XHTML 1.0!
Copyright © 2007-2016  中国科学院光电技术研究所 - Feedback
Powered by CSpace