IOE OpenIR  > 光电技术研究所被WoS收录文章
A MEMS micromirror driven by electrostatic force
Hu, Fangrong1,2; Yao, Jun1; Qiu, Chuankai1; Ren, Hao1
Source PublicationJOURNAL OF ELECTROSTATICS
Volume68Issue:3Pages:237-242
2010-06-01
Language英语
Indexed BySCI
WOS IDWOS:000278577200005
SubtypeArticle
AbstractA microelectromechanical systems (MEMS) micromirror is demonstrated in this paper. The micromirror is actuated by an electrostatic force and can achieve a large out of plane stroke by eliminating the electrostatic pull-in effect. The micromirror consists of a mirror of 400 mu m by 400 mu m in the center, a spring and three fixed bottom electrodes each side. Design principles and the analytical model are both developed, and they are verified by finite element analysis (FEA). The resonant frequency for the piston movement of the designed micromirror is about 2.5 kHz by FEA simulation. The micromirror prototype has been fabricated by a surface micromachining process and it is successfully tested using a microsystem analyzer. An out of plane stroke of 1.65 mu m is observed at 100 V and it agrees well with the predicted result from analytical model. (c) 2010 Elsevier B.V. All rights reserved.
KeywordMems Micromirror Electrostatic Force Pull-in Effect Large Stroke Out Of Plane Actuation
WOS KeywordADAPTIVE OPTICS ; DEFORMABLE MIRROR ; MEMBRANE ; ACTUATOR ; ARRAYS
WOS Research AreaEngineering
WOS SubjectEngineering, Electrical & Electronic
Citation statistics
Document Type期刊论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/3350
Collection光电技术研究所被WoS收录文章
Affiliation1.Chinese Acad Sci, Inst Opt & Elect, State Key Lab Opt Technol Microfabricat, Chengdu 610209, Peoples R China
2.Guilin Univ Elect Technol, Dept Elect Engn, Guilin 541004, Peoples R China
Recommended Citation
GB/T 7714
Hu, Fangrong,Yao, Jun,Qiu, Chuankai,et al. A MEMS micromirror driven by electrostatic force[J]. JOURNAL OF ELECTROSTATICS,2010,68(3):237-242.
APA Hu, Fangrong,Yao, Jun,Qiu, Chuankai,&Ren, Hao.(2010).A MEMS micromirror driven by electrostatic force.JOURNAL OF ELECTROSTATICS,68(3),237-242.
MLA Hu, Fangrong,et al."A MEMS micromirror driven by electrostatic force".JOURNAL OF ELECTROSTATICS 68.3(2010):237-242.
Files in This Item:
There are no files associated with this item.
Related Services
Recommend this item
Bookmark
Usage statistics
Export to Endnote
Google Scholar
Similar articles in Google Scholar
[Hu, Fangrong]'s Articles
[Yao, Jun]'s Articles
[Qiu, Chuankai]'s Articles
Baidu academic
Similar articles in Baidu academic
[Hu, Fangrong]'s Articles
[Yao, Jun]'s Articles
[Qiu, Chuankai]'s Articles
Bing Scholar
Similar articles in Bing Scholar
[Hu, Fangrong]'s Articles
[Yao, Jun]'s Articles
[Qiu, Chuankai]'s Articles
Terms of Use
No data!
Social Bookmark/Share
All comments (0)
No comment.
 

Items in the repository are protected by copyright, with all rights reserved, unless otherwise indicated.