An experimental study on the photocarrier radiometry signals of As(+) ion implanted silicon wafers before and after rapid thermal annealing is performed. The dependences of photocarrier radiometry amplitude on ion implantation dose (1x10(11)-1x10(16)/cm(2)), implantation energy (20-140 keV) and subsequent isochronical annealing temperature (500-1100 degrees C are investigated. The results show that photocarrier radiometry signals are greatly enhanced for implanted samples annealed at high temperature, especially for those with a high implantation dose. The reduced surface recombination rate resulting from a high built-in electric field generated by annealing-activated impurities in the pn junction is believed to be responsible for the photocarrier radiometry signal enhancement. Photocarrier radiometry is contactless and can therefore be used as an effective in-line tool for the thermal annealing process monitoring of the ion-implanted wafers in semiconductor industries.
1.Chinese Acad Sci, Inst Opt & Elect, Chengdu 610209, Peoples R China 2.Chinese Acad Sci, Grad Sch, Beijing 100039, Peoples R China
Recommended Citation:
Liu Xian-Ming,Li Bin-Cheng,Huang Qiu-Ping. Thermal annealing induced photocarrier radiometry enhancement for ion implanted silicon wafers[J]. CHINESE PHYSICS B,2010,19(9).
