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题名:
Phase Photon Sieve
作者: Jiang, Wenbo1,2; Hu, Song1; Zhao, Lixin1; Yan, Wei1; Yang, Yong1
刊名: JOURNAL OF COMPUTATIONAL AND THEORETICAL NANOSCIENCE
出版日期: 2010
卷号: 7, 期号:1, 页码:228-231
关键词: Diffractive Optical Element ; Phase Photon Sieve ; Numerical Simulation ; Lithographic Experiment
文章类型: Article
英文摘要: A novel diffractive optical element with high diffractive efficiency and good focusing properties is presented It is a phase photon sieve (PPS) which developed from the structure of Fresnel zone plate. The pinholes of PPS are appropriately distributed over both light zones and dark zones. The design process of the PPS is introduced. The focusing properties of the PPS are analyzed. The good performance of our proposal is demonstrated with numerical simulation and lithographic experiment. It is shown that compared with a conventional photon sieve, the PPS exhibits high diffractive efficiency and a reduced chromatic aberration. As a novel diffractive optical element, the PIPS not only can realize nano-lithography, but also offers new opportunities for high resolution X-ray microscopy and spectroscopy, astronomy, aviation in physical and life sciences.
WOS标题词: Science & Technology ; Physical Sciences ; Technology
类目[WOS]: Chemistry, Multidisciplinary ; Nanoscience & Nanotechnology ; Materials Science, Multidisciplinary ; Physics, Applied ; Physics, Condensed Matter
研究领域[WOS]: Chemistry ; Science & Technology - Other Topics ; Materials Science ; Physics
关键词[WOS]: LITHOGRAPHY ; MODEL
收录类别: SCI
语种: 英语
WOS记录号: WOS:000275349400020
Citation statistics:
内容类型: 期刊论文
URI标识: http://ir.ioe.ac.cn/handle/181551/3330
Appears in Collections:光电技术研究所被WoS收录文章_期刊论文

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作者单位: 1.Chinese Acad Sci, Inst Opt & Elect, Chengdu 610209, Peoples R China
2.Chinese Acad Sci, Grad Sch, Beijing 100039, Peoples R China

Recommended Citation:
Jiang, Wenbo,Hu, Song,Zhao, Lixin,et al. Phase Photon Sieve[J]. JOURNAL OF COMPUTATIONAL AND THEORETICAL NANOSCIENCE,2010,7(1):228-231.
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