IOE OpenIR  > 光电技术研究所被WoS收录文章
Silicon-on-insulation-based deformable mirror array for adaptive optics
Wang, D. J.1; Yao, J.1; Qiu, C. K.1; Hu, F. R.1,2; Fan, T. Q.1
Source PublicationJOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
Volume27Issue:3Pages:1291-1294
2009-05-01
Language英语
Indexed BySCI ; ISTP
WOS IDWOS:000266500300053
SubtypeArticle
AbstractIn this paper, the authors present a continuous membrane deformable mirror array based on silicon-on-insulator (SOI) bulk micromachining technology for applications in adaptive optics. In order to facilitate the use of the device layers of SOI wafers for the reflective surface and electrostatic actuators, the fabrication of the micromirror array is separated from the electronics chip, and then they are bonded together using the flip-chip assembly. The optical reflective membrane formed by the device layer of one SOI wafer is of high quality in terms of flatness and surface roughness; the stroke space is mainly determined by the height of the device layer of another wafer. The simulation results of the actuator performance by the finite element analysis method shows that the stroke is up to 2 mu m at about 70 V actuation voltage and the frequency is about 17.8 kHz.
KeywordAdaptive Optics Electrostatic Actuators Finite Element Analysis Light Reflection Micromachining Micromirrors Optical Arrays Silicon-on-insulator Surface Roughness
WOS KeywordFABRICATION
WOS Research AreaEngineering ; Science & Technology - Other Topics ; Physics
WOS SubjectEngineering, Electrical & Electronic ; Nanoscience & Nanotechnology ; Physics, Applied
Citation statistics
Document Type期刊论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/3316
Collection光电技术研究所被WoS收录文章
Affiliation1.Chinese Acad Sci, State Key Lab Opt Technol Microfabricat, Inst Opt & Elect, Chengdu 610209, Peoples R China
2.Guilin Univ Elect Technol, Coll Elect Engn, Guilin 541004, Peoples R China
Recommended Citation
GB/T 7714
Wang, D. J.,Yao, J.,Qiu, C. K.,et al. Silicon-on-insulation-based deformable mirror array for adaptive optics[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,2009,27(3):1291-1294.
APA Wang, D. J.,Yao, J.,Qiu, C. K.,Hu, F. R.,&Fan, T. Q..(2009).Silicon-on-insulation-based deformable mirror array for adaptive optics.JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,27(3),1291-1294.
MLA Wang, D. J.,et al."Silicon-on-insulation-based deformable mirror array for adaptive optics".JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B 27.3(2009):1291-1294.
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