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题名:
Silicon-on-insulation-based deformable mirror array for adaptive optics
作者: Wang, D. J.1; Yao, J.1; Qiu, C. K.1; Hu, F. R.1,2; Fan, T. Q.1
刊名: JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
出版日期: 2009-05-01
卷号: 27, 期号:3, 页码:1291-1294
关键词: adaptive optics ; electrostatic actuators ; finite element analysis ; light reflection ; micromachining ; micromirrors ; optical arrays ; silicon-on-insulator ; surface roughness
文章类型: Article
英文摘要: In this paper, the authors present a continuous membrane deformable mirror array based on silicon-on-insulator (SOI) bulk micromachining technology for applications in adaptive optics. In order to facilitate the use of the device layers of SOI wafers for the reflective surface and electrostatic actuators, the fabrication of the micromirror array is separated from the electronics chip, and then they are bonded together using the flip-chip assembly. The optical reflective membrane formed by the device layer of one SOI wafer is of high quality in terms of flatness and surface roughness; the stroke space is mainly determined by the height of the device layer of another wafer. The simulation results of the actuator performance by the finite element analysis method shows that the stroke is up to 2 mu m at about 70 V actuation voltage and the frequency is about 17.8 kHz.
WOS标题词: Science & Technology ; Technology ; Physical Sciences
类目[WOS]: Engineering, Electrical & Electronic ; Nanoscience & Nanotechnology ; Physics, Applied
研究领域[WOS]: Engineering ; Science & Technology - Other Topics ; Physics
关键词[WOS]: FABRICATION
收录类别: SCI ; ISTP
语种: 英语
WOS记录号: WOS:000266500300053
Citation statistics:
内容类型: 期刊论文
URI标识: http://ir.ioe.ac.cn/handle/181551/3316
Appears in Collections:光电技术研究所被WoS收录文章_期刊论文

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作者单位: 1.Chinese Acad Sci, State Key Lab Opt Technol Microfabricat, Inst Opt & Elect, Chengdu 610209, Peoples R China
2.Guilin Univ Elect Technol, Coll Elect Engn, Guilin 541004, Peoples R China

Recommended Citation:
Wang, D. J.,Yao, J.,Qiu, C. K.,et al. Silicon-on-insulation-based deformable mirror array for adaptive optics[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,2009,27(3):1291-1294.
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