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题名:
Modulated free carrier absorption characterization of semiconductor wafers by frequency scans at different pump-to-probe separations
作者: Li Wei1,2; Li Bin-Cheng1
刊名: ACTA PHYSICA SINICA
出版日期: 2009-09-01
卷号: 58, 期号:9, 页码:6506-6511
关键词: modulated free carrier absorption ; electronic transport properties ; frequency scans at different pump-to-probe separations ; multi-parameter fitting
文章类型: Article
英文摘要: Based on a three-dimensional modulated free carrier absorption (MFCA) model, simulation was performed to investigate the dependences of MFCA amplitude and phase on the electronic transport properties (the carrier lifetime, the carrier diffusivity, and the front surface recombination velocity) of semiconductor wafers at different pump-to-probe separations and different modulation frequencies. Experiments were performed with a silicon wafer, in which amplitude and phase were recorded as functions of modulation frequencies at several different two-beam separations. The electronic transport properties of semiconductor wafers were determined simultaneously via multi-parameter fitting procedure. These results showed that the method is capable of improving the measurement precision of the simultaneous multi-parameter determination of transport properties.
WOS标题词: Science & Technology ; Physical Sciences
类目[WOS]: Physics, Multidisciplinary
研究领域[WOS]: Physics
关键词[WOS]: SI WAFERS ; PHOTOTHERMAL MICROSCOPY ; SENSITIVITY-ANALYSIS ; SILICON-WAFERS ; RADIOMETRY ; BULK ; INTERFACE ; SURFACE ; WAVE
收录类别: SCI
语种: 英语
WOS记录号: WOS:000270156300102
Citation statistics:
内容类型: 期刊论文
URI标识: http://ir.ioe.ac.cn/handle/181551/3285
Appears in Collections:光电技术研究所被WoS收录文章_期刊论文

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作者单位: 1.Chinese Acad Sci, Inst Opt & Elect, Key Lab Beam Control, Chengdu 610209, Peoples R China
2.Chinese Acad Sci, Grad Sch, Beijing 100049, Peoples R China

Recommended Citation:
Li Wei,Li Bin-Cheng. Modulated free carrier absorption characterization of semiconductor wafers by frequency scans at different pump-to-probe separations[J]. ACTA PHYSICA SINICA,2009,58(9):6506-6511.
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