IOE OpenIR  > 光电技术研究所被WoS收录文章
Modulated free carrier absorption characterization of semiconductor wafers by frequency scans at different pump-to-probe separations
Li Wei1,2; Li Bin-Cheng1
Source PublicationACTA PHYSICA SINICA
Volume58Issue:9Pages:6506-6511
2009-09-01
Language英语
Indexed BySCI
WOS IDWOS:000270156300102
SubtypeArticle
AbstractBased on a three-dimensional modulated free carrier absorption (MFCA) model, simulation was performed to investigate the dependences of MFCA amplitude and phase on the electronic transport properties (the carrier lifetime, the carrier diffusivity, and the front surface recombination velocity) of semiconductor wafers at different pump-to-probe separations and different modulation frequencies. Experiments were performed with a silicon wafer, in which amplitude and phase were recorded as functions of modulation frequencies at several different two-beam separations. The electronic transport properties of semiconductor wafers were determined simultaneously via multi-parameter fitting procedure. These results showed that the method is capable of improving the measurement precision of the simultaneous multi-parameter determination of transport properties.
KeywordModulated Free Carrier Absorption Electronic Transport Properties Frequency Scans At Different Pump-to-probe separAtions Multi-parameter Fitting
WOS KeywordSI WAFERS ; PHOTOTHERMAL MICROSCOPY ; SENSITIVITY-ANALYSIS ; SILICON-WAFERS ; RADIOMETRY ; BULK ; INTERFACE ; SURFACE ; WAVE
WOS Research AreaPhysics
WOS SubjectPhysics, Multidisciplinary
Citation statistics
Cited Times:2[WOS]   [WOS Record]     [Related Records in WOS]
Document Type期刊论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/3285
Collection光电技术研究所被WoS收录文章
Affiliation1.Chinese Acad Sci, Inst Opt & Elect, Key Lab Beam Control, Chengdu 610209, Peoples R China
2.Chinese Acad Sci, Grad Sch, Beijing 100049, Peoples R China
Recommended Citation
GB/T 7714
Li Wei,Li Bin-Cheng. Modulated free carrier absorption characterization of semiconductor wafers by frequency scans at different pump-to-probe separations[J]. ACTA PHYSICA SINICA,2009,58(9):6506-6511.
APA Li Wei,&Li Bin-Cheng.(2009).Modulated free carrier absorption characterization of semiconductor wafers by frequency scans at different pump-to-probe separations.ACTA PHYSICA SINICA,58(9),6506-6511.
MLA Li Wei,et al."Modulated free carrier absorption characterization of semiconductor wafers by frequency scans at different pump-to-probe separations".ACTA PHYSICA SINICA 58.9(2009):6506-6511.
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