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题名:
Accurate determination of subnanoscale deformation with combined laser calorimetry and surface thermal lens technique
作者: Liu, Mingqiang1; Li, Bincheng1; Wang, Yanru1,2
刊名: APPLIED PHYSICS LETTERS
出版日期: 2009-03-30
卷号: 94, 期号:13
关键词: calorimetry ; deformation ; measurement by laser beam ; nanomechanics ; optical elements ; optical films ; optical testing ; silicon compounds ; thermal lensing ; wavefront sensors
文章类型: Article
英文摘要: Laser-induced surface deformations of optical components are measured with a combined laser calorimetry (LC) and surface thermal lens (STL) technique. The deformation is calculated from the STL amplitude by employing a simple STL model. It is also directly calculated with a rigorous deformation model by measuring the absorptance of the optical component with LC. Experimentally, the laser-induced surface deformation values of a BK7 coating sample measured by STL and Hartmann wavefront sensing techniques are in excellent agreement with that calculated with the rigorous deformation model. The measurement of subnanometer deformation with the combined LC and STL technique is demonstrated by a fused silica coating sample. The deformation measurement sensitivity and error are estimated to be 10 pm and below 10%, respectively.
WOS标题词: Science & Technology ; Physical Sciences
类目[WOS]: Physics, Applied
研究领域[WOS]: Physics
关键词[WOS]: COATINGS
收录类别: SCI
语种: 英语
WOS记录号: WOS:000264888500016
Citation statistics:
内容类型: 期刊论文
URI标识: http://ir.ioe.ac.cn/handle/181551/3277
Appears in Collections:光电技术研究所被WoS收录文章_期刊论文

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作者单位: 1.Chinese Acad Sci, Inst Opt & Elect, Chengdu 610209, Peoples R China
2.Chinese Acad Sci, Grad Sch, Beijing 100090, Peoples R China

Recommended Citation:
Liu, Mingqiang,Li, Bincheng,Wang, Yanru. Accurate determination of subnanoscale deformation with combined laser calorimetry and surface thermal lens technique[J]. APPLIED PHYSICS LETTERS,2009,94(13).
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