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题名:
Localizing surface plasmons with a metal-cladding superlens for projecting deep-subwavelength patterns
作者: Xu, T.1; Fang, L.1; Ma, J.2; Zeng, B.1; Liu, Y.1; Cui, J.1; Wang, C.1; Feng, Q.1; Luo, X.1
刊名: APPLIED PHYSICS B-LASERS AND OPTICS
出版日期: 2009-09-01
卷号: 97, 期号:1, 页码:175-179
文章类型: Article
英文摘要: Superlens, which is proposed to realize sub-diffraction-limited optical imaging, has been experimentally verified (N. Fang et al., Science 308, 534 (2005), D. Melville and R.J. Blaikie, Opt. Express 13, 2127 (2005)). Based on the basic experimental configuration, here we propose a metal-cladding structure developed to effectively localize the surface plasmons for projecting deep-subwavelength patterns. We give a numerical analysis on the structure and show that proper choices of incident wavelength can realize either deep-subwavelength interference patterning or high-quality optical imaging. The study presented here is believed to provide an approach for developing high-resolution optical lithography.
WOS标题词: Science & Technology ; Physical Sciences
类目[WOS]: Optics ; Physics, Applied
研究领域[WOS]: Optics ; Physics
关键词[WOS]: INTERFERENCE NANOLITHOGRAPHY ; EVANESCENT FIELDS ; DIFFRACTION
收录类别: SCI
语种: 英语
WOS记录号: WOS:000269844700022
Citation statistics:
内容类型: 期刊论文
URI标识: http://ir.ioe.ac.cn/handle/181551/3246
Appears in Collections:光电技术研究所被WoS收录文章_期刊论文

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作者单位: 1.Chinese Acad Sci, Inst Opt & Elect, State Key Lab Opt Technol Microfabricat, Chengdu 610209, Peoples R China
2.Shenzhen Univ, Adv Technol Res Ctr, Shenzhen 518060, Peoples R China

Recommended Citation:
Xu, T.,Fang, L.,Ma, J.,et al. Localizing surface plasmons with a metal-cladding superlens for projecting deep-subwavelength patterns[J]. APPLIED PHYSICS B-LASERS AND OPTICS,2009,97(1):175-179.
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