中国科学院光电技术研究所机构知识库
Advanced  
IOE OpenIR  > 光电技术研究所被WoS收录文章  > 期刊论文
题名:
One-step fabrication of achromatic spherical microlens array on enzyme etched gelatin film
作者: Zhu, Jianhua1; Jin, Chongwei1; Duan, Xiaoya1; Guo, Yongkang1; Yao, Jun2
刊名: MICROELECTRONIC ENGINEERING
出版日期: 2009-04-01
卷号: 86, 期号:4-6, 页码:1096-1098
关键词: Microoptical element ; Microlens array ; Gray-tone photolithography ; Silver-halide-sensitized gelatin ; Enzyme
文章类型: Article
英文摘要: Achromatic spherical microlens array is fabricated successfully on gelatin film by combining the highly efficient techniques of one-step gray-tone photolithography and novel enzyme etched silver-halide-sensitized gelatin. The microlens array has spherically continuous surface relief profile, 100% fill factor and high energy efficiency, and is ready for UV-vis-NIR broadband applications. The gray-tone mask design, reflection-type projection photolithography setup, enzyme etching processing, and the characterization of fabricated 11 x 11 gelatin microlens array, are presented in this paper. (C) 2008 Elsevier B.V. All rights reserved.
WOS标题词: Science & Technology ; Technology ; Physical Sciences
类目[WOS]: Engineering, Electrical & Electronic ; Nanoscience & Nanotechnology ; Optics ; Physics, Applied
研究领域[WOS]: Engineering ; Science & Technology - Other Topics ; Optics ; Physics
关键词[WOS]: LENS ARRAY
收录类别: SCI ; ISTP
语种: 英语
WOS记录号: WOS:000267273300168
Citation statistics:
内容类型: 期刊论文
URI标识: http://ir.ioe.ac.cn/handle/181551/3245
Appears in Collections:光电技术研究所被WoS收录文章_期刊论文

Files in This Item:

There are no files associated with this item.


作者单位: 1.Sichuan Univ, Dept Phys, Chengdu 610064, Peoples R China
2.Chinese Acad Sci, Inst Opt & Elect, Chengdu 610209, Peoples R China

Recommended Citation:
Zhu, Jianhua,Jin, Chongwei,Duan, Xiaoya,et al. One-step fabrication of achromatic spherical microlens array on enzyme etched gelatin film[J]. MICROELECTRONIC ENGINEERING,2009,86(4-6):1096-1098.
Service
Recommend this item
Sava as my favorate item
Show this item's statistics
Export Endnote File
Google Scholar
Similar articles in Google Scholar
[Zhu, Jianhua]'s Articles
[Jin, Chongwei]'s Articles
[Duan, Xiaoya]'s Articles
CSDL cross search
Similar articles in CSDL Cross Search
[Zhu, Jianhua]‘s Articles
[Jin, Chongwei]‘s Articles
[Duan, Xiaoya]‘s Articles
Related Copyright Policies
Null
Social Bookmarking
Add to CiteULike Add to Connotea Add to Del.icio.us Add to Digg Add to Reddit
所有评论 (0)
暂无评论
 
评注功能仅针对注册用户开放,请您登录
您对该条目有什么异议,请填写以下表单,管理员会尽快联系您。
内 容:
Email:  *
单位:
验证码:   刷新
您在IR的使用过程中有什么好的想法或者建议可以反馈给我们。
标 题:
 *
内 容:
Email:  *
验证码:   刷新

Items in IR are protected by copyright, with all rights reserved, unless otherwise indicated.

 

 

Valid XHTML 1.0!
Copyright © 2007-2016  中国科学院光电技术研究所 - Feedback
Powered by CSpace