We discussed approaches to achieve broadband-reflecting optical thin film coatings for the far ultraviolet spectral region down to 50 nm. The basic strategy was to enhance aluminum coating capping with a bilayer in order to obtain broadband-reflecting optical coatings for this special region. By choosing material combinations and processes, highly-reflecting coatings covering from 110 nm down to 50 urn have been realized. Experimental results show that broadband highly reflective optical coatings with an average of 0.3 in reflectance in the spectral region of 60-110 nm have been achieved with the proposed Al/MgF2/SiC system. (C) 2008 Elsevier B.V. All rights reserved.
1.Tech Univ Berlin, Inst Festkorperphys, D-10623 Berlin, Germany 2.Wuhan Univ Technol, Ctr Fiber Sensing, Wuhan 430071, Peoples R China 3.Chinese Acad Sci, Inst Opt & Elect, Chengdu 610209, Peoples R China
Recommended Citation:
Yang, Minghong,Zhou, Ciming,Jiang, Desheng,et al. Broadband-reflecting optical thin films for the far ultraviolet spectral range[J]. THIN SOLID FILMS,2008,517(2):878-880.
