We discussed approaches to achieve broadband-reflecting optical thin film coatings for the far ultraviolet spectral region down to 50 nm. The basic strategy was to enhance aluminum coating capping with a bilayer in order to obtain broadband-reflecting optical coatings for this special region. By choosing material combinations and processes, highly-reflecting coatings covering from 110 nm down to 50 urn have been realized. Experimental results show that broadband highly reflective optical coatings with an average of 0.3 in reflectance in the spectral region of 60-110 nm have been achieved with the proposed Al/MgF2/SiC system. (C) 2008 Elsevier B.V. All rights reserved.