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题名:
Broadband-reflecting optical thin films for the far ultraviolet spectral range
作者: Yang, Minghong1,2; Zhou, Ciming2; Jiang, Desheng2; Shen, Lin3
刊名: THIN SOLID FILMS
出版日期: 2008-11-28
卷号: 517, 期号:2, 页码:878-880
关键词: Broadband-reflecting coating ; Far ultraviolet ; Thin films ; Metal mirror
文章类型: Article
英文摘要: We discussed approaches to achieve broadband-reflecting optical thin film coatings for the far ultraviolet spectral region down to 50 nm. The basic strategy was to enhance aluminum coating capping with a bilayer in order to obtain broadband-reflecting optical coatings for this special region. By choosing material combinations and processes, highly-reflecting coatings covering from 110 nm down to 50 urn have been realized. Experimental results show that broadband highly reflective optical coatings with an average of 0.3 in reflectance in the spectral region of 60-110 nm have been achieved with the proposed Al/MgF2/SiC system. (C) 2008 Elsevier B.V. All rights reserved.
WOS标题词: Science & Technology ; Technology ; Physical Sciences
类目[WOS]: Materials Science, Multidisciplinary ; Materials Science, Coatings & Films ; Physics, Applied ; Physics, Condensed Matter
研究领域[WOS]: Materials Science ; Physics
关键词[WOS]: EXTREME-ULTRAVIOLET ; MULTILAYER COATINGS ; X-RAY ; CONSTANTS ; MIRRORS ; UV ; EXPOSURE ; ANGLES ; LIF ; NM
收录类别: SCI
语种: 英语
WOS记录号: WOS:000261693900078
Citation statistics:
内容类型: 期刊论文
URI标识: http://ir.ioe.ac.cn/handle/181551/3230
Appears in Collections:光电技术研究所被WoS收录文章_期刊论文

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作者单位: 1.Tech Univ Berlin, Inst Festkorperphys, D-10623 Berlin, Germany
2.Wuhan Univ Technol, Ctr Fiber Sensing, Wuhan 430071, Peoples R China
3.Chinese Acad Sci, Inst Opt & Elect, Chengdu 610209, Peoples R China

Recommended Citation:
Yang, Minghong,Zhou, Ciming,Jiang, Desheng,et al. Broadband-reflecting optical thin films for the far ultraviolet spectral range[J]. THIN SOLID FILMS,2008,517(2):878-880.
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