Knowledge Management System Of Institute of optics and electronics, CAS
Broadband-reflecting optical thin films for the far ultraviolet spectral range | |
Yang, Minghong1,2; Zhou, Ciming2; Jiang, Desheng2; Shen, Lin3 | |
Source Publication | THIN SOLID FILMS
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Volume | 517Issue:2Pages:878-880 |
2008-11-28 | |
Language | 英语 |
Indexed By | SCI |
WOS ID | WOS:000261693900078 |
Subtype | Article |
Abstract | We discussed approaches to achieve broadband-reflecting optical thin film coatings for the far ultraviolet spectral region down to 50 nm. The basic strategy was to enhance aluminum coating capping with a bilayer in order to obtain broadband-reflecting optical coatings for this special region. By choosing material combinations and processes, highly-reflecting coatings covering from 110 nm down to 50 urn have been realized. Experimental results show that broadband highly reflective optical coatings with an average of 0.3 in reflectance in the spectral region of 60-110 nm have been achieved with the proposed Al/MgF2/SiC system. (C) 2008 Elsevier B.V. All rights reserved. |
Keyword | Broadband-reflecting Coating Far Ultraviolet Thin Films Metal Mirror |
WOS Keyword | EXTREME-ULTRAVIOLET ; MULTILAYER COATINGS ; X-RAY ; CONSTANTS ; MIRRORS ; UV ; EXPOSURE ; ANGLES ; LIF ; NM |
WOS Research Area | Materials Science ; Physics |
WOS Subject | Materials Science, Multidisciplinary ; Materials Science, Coatings & Films ; Physics, Applied ; Physics, Condensed Matter |
Citation statistics | |
Document Type | 期刊论文 |
Identifier | http://ir.ioe.ac.cn/handle/181551/3230 |
Collection | 光电技术研究所被WoS收录文章 |
Affiliation | 1.Tech Univ Berlin, Inst Festkorperphys, D-10623 Berlin, Germany 2.Wuhan Univ Technol, Ctr Fiber Sensing, Wuhan 430071, Peoples R China 3.Chinese Acad Sci, Inst Opt & Elect, Chengdu 610209, Peoples R China |
Recommended Citation GB/T 7714 | Yang, Minghong,Zhou, Ciming,Jiang, Desheng,et al. Broadband-reflecting optical thin films for the far ultraviolet spectral range[J]. THIN SOLID FILMS,2008,517(2):878-880. |
APA | Yang, Minghong,Zhou, Ciming,Jiang, Desheng,&Shen, Lin.(2008).Broadband-reflecting optical thin films for the far ultraviolet spectral range.THIN SOLID FILMS,517(2),878-880. |
MLA | Yang, Minghong,et al."Broadband-reflecting optical thin films for the far ultraviolet spectral range".THIN SOLID FILMS 517.2(2008):878-880. |
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