IOE OpenIR  > 光电技术研究所被WoS收录文章
Surface accuracy analysis of active stressed lap based on structure function
Zhao, Hongshen1,2; Fan, Bin1; Li, Xiaojin1; Zeng, Zhige1
Source PublicationOPTICAL REVIEW
Volume22Issue:1Pages:52-57
2015-02-01
Language英语
Indexed BySCI
WOS IDWOS:000353630200008
SubtypeArticle
AbstractIn grinding and polishing of big mirrors using active stressed lap, lap surface accuracy restricts mirror accuracy and processing efficiency chiefly. Lap surface error, which is the mismatch between the mirror and the lap, causes partial pressure concentration and poor efficiency in grinding or polishing. Different from surface representation of active stressed lap using PV and RMS, structure function could describe average variance over all regions on lap in a given separation. This paper illustrates an efficient technique for representing active stressed lap surface error using structure function and relating bending model to the representation. Example of this procedure is described and results show that this method could represent lap surface exactly; meanwhile the surface accuracy after compensating residual error caused by lap sag could achieve allowable error specification for big mirror manufacturing.
KeywordStructure Function Active Stressed Lap Big Mirror Processing Surface Representation
WOS KeywordMIRROR
WOS Research AreaOptics
WOS SubjectOptics
Citation statistics
Cited Times:2[WOS]   [WOS Record]     [Related Records in WOS]
Document Type期刊论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/2556
Collection光电技术研究所被WoS收录文章
Affiliation1.Chinese Acad Sci, Inst Opt & Elect, Chengdu 610209, Peoples R China
2.Univ Chinese Acad Sci, Beijing 100039, Peoples R China
Recommended Citation
GB/T 7714
Zhao, Hongshen,Fan, Bin,Li, Xiaojin,et al. Surface accuracy analysis of active stressed lap based on structure function[J]. OPTICAL REVIEW,2015,22(1):52-57.
APA Zhao, Hongshen,Fan, Bin,Li, Xiaojin,&Zeng, Zhige.(2015).Surface accuracy analysis of active stressed lap based on structure function.OPTICAL REVIEW,22(1),52-57.
MLA Zhao, Hongshen,et al."Surface accuracy analysis of active stressed lap based on structure function".OPTICAL REVIEW 22.1(2015):52-57.
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