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题名:
Edge effect modeling and experiments on active lap processing
作者: Liu, Haitao1,2; Wu, Fan2; Zeng, Zhige2; Fan, Bin2; Wan, Yongjian2
刊名: OPTICS EXPRESS
出版日期: 2014-05-05
卷号: 22, 期号:9, 页码:10761-10774
文章类型: Article
英文摘要: Edge effect is regarded as one of the most difficult technical issues for fabricating large primary mirrors, especially for large polishing tools. Computer controlled active lap (CCAL) uses a large size pad (e.g., 1/3 to 1/5 workpiece diameters) to grind and polish the primary mirror. Edge effect also exists in the CCAL process in our previous fabrication. In this paper the material removal rules when edge effects happen (i.e. edge tool influence functions (TIFs)) are obtained through experiments, which are carried out on a Phi 1090-mm circular flat mirror with a 375-mm-diameter lap. Two methods are proposed to model the edge TIFs for CCAL. One is adopting the pressure distribution which is calculated based on the finite element analysis method. The other is building up a parametric equivalent pressure model to fit the removed material curve directly. Experimental results show that these two methods both effectively model the edge TIF of CCAL. (C) 2014 Optical Society of America
WOS标题词: Science & Technology ; Physical Sciences
类目[WOS]: Optics
研究领域[WOS]: Optics
关键词[WOS]: TOOL INFLUENCE FUNCTIONS ; PRESTON EQUATION
收录类别: SCI
语种: 英语
WOS记录号: WOS:000335905300105
Citation statistics:
内容类型: 期刊论文
URI标识: http://ir.ioe.ac.cn/handle/181551/2521
Appears in Collections:光电技术研究所被WoS收录文章_期刊论文

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作者单位: 1.Chinese Acad Sci, Inst Opt & Elect, Chengdu 610209, Peoples R China
2.Univ Chinese Acad Sci, Beijing 100039, Peoples R China

Recommended Citation:
Liu, Haitao,Wu, Fan,Zeng, Zhige,et al. Edge effect modeling and experiments on active lap processing[J]. OPTICS EXPRESS,2014,22(9):10761-10774.
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