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题名:
Improving Imaging Contrast of Non-Contacted Plasmonic Lens by Off-Axis Illumination with High Numerical Aperture
作者: Huang, Qizhao1,2; Wang, Changtao1; Yao, Na1; Zhao, Zeyu1; Wang, Yanqin1; Gao, Ping1; Luo, Yunfei1; Zhang, Wei1; Wang, Hao2; Luo, Xiangang1
刊名: PLASMONICS
出版日期: 2014-06-01
卷号: 9, 期号:3, 页码:699-706
关键词: Surface plasmons ; Subwavelength structures ; Superresolution
文章类型: Article
英文摘要: Off-axis illumination plasmonic lens (OAIPL) is proposed and demonstrated to improve the imaging contrast in non-contacted application manner. The spatial Fourier components of light transmitted through the nano-patterns are greatly enhanced in the imaging process by shifting the wave vectors with high numerical aperture off-axis illumination. On the other hand, a reflector in the image area helps to tailor the ratio between electric field components in the tangential and normal directions. These two effects resultantly deliver significant improvement of imaging performance, including enhanced resolution, imaging contrast, and elongation of air gap thickness. In comparison to the case of normal illumination, the air gap thickness for 30 and 60 nm half-pitch resolution is extended to 25 and 100 nm by OAIPL with numerical aperture (NA) = 1.55, respectively.
WOS标题词: Science & Technology ; Physical Sciences ; Technology
类目[WOS]: Chemistry, Physical ; Nanoscience & Nanotechnology ; Materials Science, Multidisciplinary
研究领域[WOS]: Chemistry ; Science & Technology - Other Topics ; Materials Science
关键词[WOS]: INTERFERENCE NANOLITHOGRAPHY ; SILVER SUPERLENS ; PHOTOLITHOGRAPHY ; LITHOGRAPHY ; REFRACTION
收录类别: SCI
语种: 英语
WOS记录号: WOS:000336021700028
Citation statistics:
内容类型: 期刊论文
URI标识: http://ir.ioe.ac.cn/handle/181551/2494
Appears in Collections:光电技术研究所被WoS收录文章_期刊论文

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作者单位: 1.Chinese Acad Sci, Inst Opt & Elect, State Key Lab Opt Technol Nanofabricat & Microeng, Chengdu 610209, Peoples R China
2.Univ Elect Sci & Technol China, Sch Mechatron Engn, Chengdu 611731, Peoples R China

Recommended Citation:
Huang, Qizhao,Wang, Changtao,Yao, Na,et al. Improving Imaging Contrast of Non-Contacted Plasmonic Lens by Off-Axis Illumination with High Numerical Aperture[J]. PLASMONICS,2014,9(3):699-706.
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