IOE OpenIR  > 光电技术研究所被WoS收录文章
Moire interferometry with high alignment resolution in proximity lithographic process
Zhou, Shaolin1,4; Hu, Song2; Fu, Yongqi3; Xu, Xiangmin1; Yang, Jun4
Source PublicationAPPLIED OPTICS
Volume53Issue:5Pages:951-959
2014-02-10
Language英语
Indexed BySCI
WOS IDWOS:000331368300022
SubtypeArticle
AbstractMoire interferometry is widely used as the precise metrology in many science and engineering fields. The schemes of moires-based interferometry adopting diffraction gratings are presented in this paper for applications in a proximity lithographic system such as wafer-mask alignment, the in-plane twist angle adjustment, and tilts remediation. For the sake of adjustment of lateral offset as well as the tilt and in-plane twist angle, schemes of the (m, -m) and (m, 0) moire interferometry are explored, respectively. Fundamental derivation of the moire interferometry and schemes for related applications are provided. Three pairs of gratings with close periods are fabricated to form the composite grating. And experiments are performed to confirm the moire interferometry for related applications in our proximity lithographic system. Experimental results indicate that unaligned lateral offset is detectable with resolution at the nanometer level, and the tilt and in-plane twist angle between wafer and mask could be manually decreased down to the scope of 10(-3) and 10(-4) rad, respectively. (C) 2014 Optical Society of America
WOS KeywordX-RAY-LITHOGRAPHY ; SOFT LITHOGRAPHY ; SYSTEM ; PHOTOLITHOGRAPHY ; FABRICATION ; FRINGES ; LIMITS
WOS Research AreaOptics
WOS SubjectOptics
Citation statistics
Cited Times:4[WOS]   [WOS Record]     [Related Records in WOS]
Document Type期刊论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/2479
Collection光电技术研究所被WoS收录文章
Affiliation1.S China Univ Technol, Sch Elect & Informat Engn, Guangzhou 510640, Guangdong, Peoples R China
2.Chinese Acad Sci, Inst Opt & Elect, State Key Lab Opt Technol Microfabricat, Chengdu 610209, Peoples R China
3.Univ Elect Sci & Technol China, Sch Phys Elect, Chengdu 610054, Peoples R China
4.Univ Western Ontario, Dept Mech & Mat Engn, London, ON N6A 5B9, Canada
Recommended Citation
GB/T 7714
Zhou, Shaolin,Hu, Song,Fu, Yongqi,et al. Moire interferometry with high alignment resolution in proximity lithographic process[J]. APPLIED OPTICS,2014,53(5):951-959.
APA Zhou, Shaolin,Hu, Song,Fu, Yongqi,Xu, Xiangmin,&Yang, Jun.(2014).Moire interferometry with high alignment resolution in proximity lithographic process.APPLIED OPTICS,53(5),951-959.
MLA Zhou, Shaolin,et al."Moire interferometry with high alignment resolution in proximity lithographic process".APPLIED OPTICS 53.5(2014):951-959.
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