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Experimental study of Talbot imaging moire-based lithography alignment method
Zhu, Jiangping1,2,3; Hu, Song1; Zhou, Pei1,3; Yu, Junsheng2
Source PublicationOPTICS AND LASERS IN ENGINEERING
Volume58Pages:54-59
2014-07-01
Language英语
Indexed BySCI
WOS IDWOS:000334818300008
SubtypeArticle
AbstractA four-quadrant gratings alignment method was presented for proximity lithography, which experimentally achieved the alignment accuracy of nanometer level. The alignment marks consist of gratings with slightly different periods, leading to different Talbot distances with the same monochromatic planar wave. The contrast of moire fringe varies with the gap between mask (alignment mark) and wafer (alignment mark), which will affect the phase comparison, and induce more errors as well. This paper concentrates on the optimization of parameters of alignment marks to achieve the resulting moire fringes with an optimum contrast. By simulation and experiment, we investigate effects of the gap on the contrast, based on which, the design principle of alignment marks is concluded, and it is helpful to the practicability with our proposed alignment method. (C) 2014 Elsevier Ltd. All rights reserved.
KeywordAlignment Moire Techniques Gratings Talbot And Self-imaging Effects
WOS KeywordX-RAY-LITHOGRAPHY ; NANOIMPRINT LITHOGRAPHY ; PROXIMITY LITHOGRAPHY ; FRINGE ; GRATINGS ; SYSTEM ; IMAGES
WOS Research AreaOptics
WOS SubjectOptics
Citation statistics
Document Type期刊论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/2467
Collection光电技术研究所被WoS收录文章
Affiliation1.Chinese Acad Sci, Inst Opt & Elect, Chengdu 610209, Peoples R China
2.Univ Elect Sci & Technol China, Sch Optoelect Informat, Chengdu 610054, Peoples R China
3.Univ Chinese Acad Sci, Beijing 100039, Peoples R China
Recommended Citation
GB/T 7714
Zhu, Jiangping,Hu, Song,Zhou, Pei,et al. Experimental study of Talbot imaging moire-based lithography alignment method[J]. OPTICS AND LASERS IN ENGINEERING,2014,58:54-59.
APA Zhu, Jiangping,Hu, Song,Zhou, Pei,&Yu, Junsheng.(2014).Experimental study of Talbot imaging moire-based lithography alignment method.OPTICS AND LASERS IN ENGINEERING,58,54-59.
MLA Zhu, Jiangping,et al."Experimental study of Talbot imaging moire-based lithography alignment method".OPTICS AND LASERS IN ENGINEERING 58(2014):54-59.
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