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题名:
Focal length measurement of a microlens-array by grating shearing interferometry
作者: Zhu, Xianchang; Hu, Song; Zhao, Lixin
刊名: APPLIED OPTICS
出版日期: 2014-10-10
卷号: 53, 期号:29, 页码:6663-6669
文章类型: Article
英文摘要: Based on grating shearing interferometry, a simple technique is introduced for focal length measurements of a microlens-array (MLA). The measurement system is composed of a He-Ne laser, condenser, collimator, the MLA under testing, a Ronchi grating, and CCD sensor. The plane wavefront from the collimator is transformed to a spherical wavefront by the MLA, while the curvature center is at the focus. Interference stripes appear at the overlap between the zero-order and first-order diffractive patterns of the grating and are detected by the CCD sensor. By analyzing the period change of stripes, the focal length is determined after the defocus of the grating is calculated. To validate the feasibility, an experiment is performed. The measurement uncertainty is discussed and measurement accuracy was determined to be 2%. (C) 2014 Optical Society of America
WOS标题词: Science & Technology ; Physical Sciences
类目[WOS]: Optics
研究领域[WOS]: Optics
关键词[WOS]: FABRICATION ; DESIGN
收录类别: SCI
语种: 英语
WOS记录号: WOS:000343160200041
Citation statistics:
内容类型: 期刊论文
URI标识: http://ir.ioe.ac.cn/handle/181551/2449
Appears in Collections:光电技术研究所被WoS收录文章_期刊论文

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作者单位: Chinese Acad Sci, Inst Opt & Elect, State Key Lab Opt Technol Microfabricat, Chengdu 610209, Sichuan, Peoples R China

Recommended Citation:
Zhu, Xianchang,Hu, Song,Zhao, Lixin. Focal length measurement of a microlens-array by grating shearing interferometry[J]. APPLIED OPTICS,2014,53(29):6663-6669.
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