中国科学院光电技术研究所机构知识库
Advanced  
IOE OpenIR  > 光电技术研究所被WoS收录文章  > 期刊论文
题名:
Absolute interferometric shift-rotation method with pixel-level spatial frequency resolution
作者: Song, Weihong1,2; Hou, Xi1; Wu, Fan1; Wan, Yongjian1
刊名: OPTICS AND LASERS IN ENGINEERING
出版日期: 2014-03-01
卷号: 54, 页码:68-72
关键词: Interferometry ; Absolute testing ; Shift-rotation ; Surface measurements
文章类型: Article
英文摘要: Absolute interferometric testing method of shift-rotation in a Fizeau interferometer is effective in optical surface metrology with high accuracy and has been developed for decades. A pixel-level spatial frequency solution of interferometric shift-rotation method is presented in the manuscript. It requires a 90 degrees rotational measurement and at least two translational measurements with different translations in the x and y directions besides a measurement at an original confocal position (0 degrees). With the well-organized absolute procedures, the absolute surface deviation of the test and reference surface can be obtained accurately with pixel-level spatial frequency resolution. As a result, the absolute results of the method contain much more mid-to high spatial frequency information and it is useful to directly detect the defects (dusts, pits) of the test and reference surfaces. No orthogonal polynomials fitting (such as Zernike polynomials) and interpolations are required in the calculation, and the absolute results can be guaranteed with high accuracy. Experimental absolute results of flat surfaces are given. (C) 2013 Elsevier Ltd. All rights reserved.
WOS标题词: Science & Technology ; Physical Sciences
类目[WOS]: Optics
研究领域[WOS]: Optics
关键词[WOS]: SURFACE
收录类别: SCI
语种: 英语
WOS记录号: WOS:000328720700011
Citation statistics:
内容类型: 期刊论文
URI标识: http://ir.ioe.ac.cn/handle/181551/2430
Appears in Collections:光电技术研究所被WoS收录文章_期刊论文

Files in This Item:

There are no files associated with this item.


作者单位: 1.Chinese Acad Sci, Inst Opt & Elect, Chengdu 610209, Peoples R China
2.Univ Chinese Acad Sci, Beijing 100039, Peoples R China

Recommended Citation:
Song, Weihong,Hou, Xi,Wu, Fan,et al. Absolute interferometric shift-rotation method with pixel-level spatial frequency resolution[J]. OPTICS AND LASERS IN ENGINEERING,2014,54:68-72.
Service
Recommend this item
Sava as my favorate item
Show this item's statistics
Export Endnote File
Google Scholar
Similar articles in Google Scholar
[Song, Weihong]'s Articles
[Hou, Xi]'s Articles
[Wu, Fan]'s Articles
CSDL cross search
Similar articles in CSDL Cross Search
[Song, Weihong]‘s Articles
[Hou, Xi]‘s Articles
[Wu, Fan]‘s Articles
Related Copyright Policies
Null
Social Bookmarking
Add to CiteULike Add to Connotea Add to Del.icio.us Add to Digg Add to Reddit
所有评论 (0)
暂无评论
 
评注功能仅针对注册用户开放,请您登录
您对该条目有什么异议,请填写以下表单,管理员会尽快联系您。
内 容:
Email:  *
单位:
验证码:   刷新
您在IR的使用过程中有什么好的想法或者建议可以反馈给我们。
标 题:
 *
内 容:
Email:  *
验证码:   刷新

Items in IR are protected by copyright, with all rights reserved, unless otherwise indicated.

 

 

Valid XHTML 1.0!
Copyright © 2007-2016  中国科学院光电技术研究所 - Feedback
Powered by CSpace