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题名:
A 45-element continuous facesheet surface micromachined deformable mirror for optical aberration correction
作者: Wang, Weimin1,2,3; Hu, Fangrong4; Wang, Qiang1; Qiu, Chuankai1; Chen, Zexiang2; Yao, Jun1
刊名: AIP ADVANCES
出版日期: 2014-03-01
卷号: 4, 期号:3
文章类型: Article
英文摘要: A 45-element continuous facesheet surface micromachined deformable mirror (DM) is presented and is fabricated using the PolyMUMPs multi-user micro-electromechanical system processes. The effects of the structural parameters on the characteristics of the DM, such as its stroke, frequency and actuator coupling, are analyzed. In addition, the DM design has also been verified through experimental testing. This DM prototype has a surface figure of 0.5 mu m and a fill factor of 95%. The DM can provide a 0.6 mu m stroke with 5.9% actuator coupling. A static aberration correction based on this DM is also demonstrated, which acts as a reference for the potential adaptive optics (AO) applications of the device. (C) 2014 Author(s).
WOS标题词: Science & Technology ; Technology ; Physical Sciences
类目[WOS]: Nanoscience & Nanotechnology ; Materials Science, Multidisciplinary ; Physics, Applied
研究领域[WOS]: Science & Technology - Other Topics ; Materials Science ; Physics
关键词[WOS]: ADAPTIVE OPTICS
收录类别: SCI
语种: 英语
WOS记录号: WOS:000334213700018
Citation statistics:
内容类型: 期刊论文
URI标识: http://ir.ioe.ac.cn/handle/181551/2428
Appears in Collections:光电技术研究所被WoS收录文章_期刊论文

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作者单位: 1.Chinese Acad Sci, Inst Opt & Elect, State Key Lab Opt Technol Nanofabricat & Microeng, Chengdu 610209, Peoples R China
2.Univ Elect Sci & Technol China, Sch Optoelect Informat, Chengdu 610054, Peoples R China
3.Univ Chinese Acad Sci, Beijing 100049, Peoples R China
4.Guilin Univ Elect Technol, Coll Elect Engn & Automatizat, Guilin 541004, Peoples R China

Recommended Citation:
Wang, Weimin,Hu, Fangrong,Wang, Qiang,et al. A 45-element continuous facesheet surface micromachined deformable mirror for optical aberration correction[J]. AIP ADVANCES,2014,4(3).
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