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题名:
Plane demagnifying nanolithography by hybrid hyperlens-superlens structure
作者: Liang, Gaofeng1,2; Zhao, Zeyu2; Yao, Na2; Wang, Changtao2; Jiang, Bo3; Zhao, Qing1; Luo, Xiangang2
刊名: JOURNAL OF NANOPHOTONICS
出版日期: 2014-07-10
卷号: 8
关键词: surface plasmon ; nanophotonics ; multilayer
文章类型: Article
英文摘要: We propose a hybrid hyperlens-superlens structure to achieve demagnifying nanolithography. It consists of a core of planar superlens and a shell of cylinder hyperlens. In the nanolithography process, the shell of the cylinder hyperlens could demagnify the mask patterns to the interior cylinder interface, and then the core of the planar superlens transmits the demagnified patterns to the planar output photoresist layer. The performance of this hybrid hyperlens-superlens structure is analyzed for different periods and spacing of mask and demagnification factors. The numerical simulation results agree well with the theory. It is demonstrated that the hybrid structure could be used as a superresolution device for plane demagnifying nanolithography. (C) 2014 Society of Photo-Optical Instrumentation Engineers (SPIE).
WOS标题词: Science & Technology ; Physical Sciences
类目[WOS]: Nanoscience & Nanotechnology ; Optics
研究领域[WOS]: Science & Technology - Other Topics ; Optics
关键词[WOS]: OPTICAL HYPERLENS ; FIELD
收录类别: SCI
语种: 英语
WOS记录号: WOS:000339160200001
Citation statistics:
内容类型: 期刊论文
URI标识: http://ir.ioe.ac.cn/handle/181551/2427
Appears in Collections:光电技术研究所被WoS收录文章_期刊论文

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作者单位: 1.Univ Elect Sci & Technol China, Sch Phys Elect, Chengdu 610054, Peoples R China
2.Chinese Acad Sci, Inst Opt & Elect, State Key Lab Opt Technol Nanofabricat & Microeng, Chengdu 610209, Peoples R China
3.China Elect Technol Grp Corp, Res Inst 33, Taiyuan 030006, Peoples R China

Recommended Citation:
Liang, Gaofeng,Zhao, Zeyu,Yao, Na,et al. Plane demagnifying nanolithography by hybrid hyperlens-superlens structure[J]. JOURNAL OF NANOPHOTONICS,2014,8.
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