IOE OpenIR  > 光电技术研究所被WoS收录文章
High resolution photolithography with sub-wavelength grating
Zhao, Qing1; Liang, Gaofeng1,2; Wang, Changtao2; Huang, Xiaoping1; Chen, Zexiang3; Luo, Xiangang2
Source PublicationAPPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING
Volume115Issue:1Pages:69-73
2014-04-01
Language英语
Indexed BySCI
WOS IDWOS:000333612400012
SubtypeArticle
AbstractBased on the theory of surface plasmon resonance and the special nano-optical effect of metal/dielectric multilayer composites, we obtained a high-resolution image of a sub-wavelength grating. We discussed multilayer parameters on equal thickness, and achieved sufficient contrast and high intensity through numerical simulation based on the finite element method. By chosen the best scheme, an experimental of multilayer planar lens lithography has been carried out. The main point is the use of metal-dielectric composites to realize high-resolution image under 365-nm polarization light incidence. By controlling the experimental parameters accurately, a fidelity image is recorded on the photoresist.
WOS KeywordSILVER SUPERLENS
WOS Research AreaMaterials Science ; Physics
WOS SubjectMaterials Science, Multidisciplinary ; Physics, Applied
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Document Type期刊论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/2419
Collection光电技术研究所被WoS收录文章
Affiliation1.Univ Elect Sci & Technol China, Sch Phys Elect, Chengdu 610054, Peoples R China
2.Chinese Acad Sci, Inst Opt & Elect, State Key Lab Opt Technol Nanofabricat & Microeng, Chengdu 610209, Peoples R China
3.Univ Elect Sci & Technol China, Sch Opt Elect Informat, Chengdu 610054, Peoples R China
Recommended Citation
GB/T 7714
Zhao, Qing,Liang, Gaofeng,Wang, Changtao,et al. High resolution photolithography with sub-wavelength grating[J]. APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING,2014,115(1):69-73.
APA Zhao, Qing,Liang, Gaofeng,Wang, Changtao,Huang, Xiaoping,Chen, Zexiang,&Luo, Xiangang.(2014).High resolution photolithography with sub-wavelength grating.APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING,115(1),69-73.
MLA Zhao, Qing,et al."High resolution photolithography with sub-wavelength grating".APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING 115.1(2014):69-73.
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