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题名:
Method to calculate the error correction ability of tool influence function in certain polishing conditions
作者: Wang, Jia1,2; Fan, Bin1; Wan, Yongjian1,3; Shi, Chunyan1; Zhuo, Bin1
刊名: OPTICAL ENGINEERING
出版日期: 2014-07-01
卷号: 53, 期号:7
关键词: polishing ; tool influence function ; computer-controlled optical surfacing ; power spectral density ; convolution model ; spatial frequency errors
文章类型: Article
英文摘要: Tool influence function (TIF) is quite important for computer-controlled optical surfacing (CCOS) technology. Quantitatively investigating the error correction ability of TIF in frequency domain is essential for CCOS to restrain different spatial frequency errors. The smoothing spectral function (SSF) is a newly proposed parameter to evaluate the error correction ability of CCOS process. Based on the SSF, a new method to calculate the error correction ability of TIF in certain polishing conditions will be proposed. The basic mathematical model for this method will be established in theory. A set of polishing experiments with rigid conformal (RC) tool are performed to calculate the error correction ability of TIF. The calculated results can quantitatively indicate the error correction ability of TIF for different spatial frequency errors in certain polishing conditions. (c) 2014 Society of Photo-Optical Instrumentation Engineers (SPIE)
WOS标题词: Science & Technology ; Physical Sciences
类目[WOS]: Optics
研究领域[WOS]: Optics
关键词[WOS]: FREQUENCY SURFACE ERRORS ; MODEL
收录类别: SCI
语种: 英语
WOS记录号: WOS:000341183900046
Citation statistics:
内容类型: 期刊论文
URI标识: http://ir.ioe.ac.cn/handle/181551/2416
Appears in Collections:光电技术研究所被WoS收录文章_期刊论文

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作者单位: 1.Chinese Acad Sci, Inst Opt & Elect, Chengdu 610209, Peoples R China
2.Univ Chinese Acad Sci, Beijing 100039, Peoples R China
3.State Key Lab Opt Technol Microfabricat, Chengdu 610209, Peoples R China

Recommended Citation:
Wang, Jia,Fan, Bin,Wan, Yongjian,et al. Method to calculate the error correction ability of tool influence function in certain polishing conditions[J]. OPTICAL ENGINEERING,2014,53(7).
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