IOE OpenIR  > 光电技术研究所被WoS收录文章
Fabrication of circular microstructure array based on a controlled diffractive pattern
Li, Shuhong1,2; Du, Jinglei1; Zhang, Zhiyou1; Gao, Fuhua1; Gao, Hongtao2; Du, Chunlei2
Source PublicationMICROELECTRONIC ENGINEERING
Volume115Pages:13-15
2014-03-01
Language英语
Indexed BySCI
WOS IDWOS:000330502700004
SubtypeArticle
AbstractSubwavelength metal circular structures have wide potential applications for the higher transmission efficiency than holes. A circular structures fabrication method is demonstrated by employing the diffraction pattern generated with some available regular structures. The inversion algorithm of the parameters of diffractive object is built from the required diffractive pattern based on the scalar diffractive theory. To validate the approach, a circular screen in array with size of 1.1 mu m was designed and fabricated as mask. Finally, an annulus array with feature size of 680 nm is formed in the resist. (C) 2013 Elsevier B.V. All rights reserved.
KeywordLithography Circular Microstructure Diffractive Pattern
WOS KeywordRADIALLY POLARIZED-LIGHT ; SURFACE-PLASMONS ; TRANSMISSION ; LITHOGRAPHY ; APERTURE ; BEAM ; LENS
WOS Research AreaEngineering ; Science & Technology - Other Topics ; Optics ; Physics
WOS SubjectEngineering, Electrical & Electronic ; Nanoscience & Nanotechnology ; Optics ; Physics, Applied
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Document Type期刊论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/2415
Collection光电技术研究所被WoS收录文章
Affiliation1.Sichuan Univ, Sch Phys, Chengdu 610064, Peoples R China
2.Chinese Acad Sci, Inst Opt & Elect, Chengdu 610209, Peoples R China
Recommended Citation
GB/T 7714
Li, Shuhong,Du, Jinglei,Zhang, Zhiyou,et al. Fabrication of circular microstructure array based on a controlled diffractive pattern[J]. MICROELECTRONIC ENGINEERING,2014,115:13-15.
APA Li, Shuhong,Du, Jinglei,Zhang, Zhiyou,Gao, Fuhua,Gao, Hongtao,&Du, Chunlei.(2014).Fabrication of circular microstructure array based on a controlled diffractive pattern.MICROELECTRONIC ENGINEERING,115,13-15.
MLA Li, Shuhong,et al."Fabrication of circular microstructure array based on a controlled diffractive pattern".MICROELECTRONIC ENGINEERING 115(2014):13-15.
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