Subwavelength metal circular structures have wide potential applications for the higher transmission efficiency than holes. A circular structures fabrication method is demonstrated by employing the diffraction pattern generated with some available regular structures. The inversion algorithm of the parameters of diffractive object is built from the required diffractive pattern based on the scalar diffractive theory. To validate the approach, a circular screen in array with size of 1.1 mu m was designed and fabricated as mask. Finally, an annulus array with feature size of 680 nm is formed in the resist. (C) 2013 Elsevier B.V. All rights reserved.